The effect of In doping, used to reduce the high resistivities of CdS films deposited at substrate temperatures above 300 °C, on film structure and morphology was studied because of their importance as an appropriate n-type window layer in several types of heterojunction solar cells. Doping with In, even at the lowest doping levels utilized, resulted in the desired reduction in the resistivities from 105 to 10−2 Ω cm. The films were n type with electron concentration of 1018 to 1019 cm−3 and mobility of 14 to 75 cm2 V−1 s−1. At low doping levels, the CdS films remained compact, maintaining their columnar growth, with grain diameters ∼4 μm and the columns mostly along the c axis of the wurtzite phase of CdS being aligned normal to the substrate surface. With higher In incorporation, a slow transformation to much smaller elongated grains, with c axis along the substrate surface was observed. This has been attributed to the segregatino of In at the grain boundaries as CdIn2S4.