Distribution Of Abrasive Particles Research Articles

Surface topography prediction of slider races using formed grinding wheel shape and material removal mechanism

Compared with the roughness, the three-dimensional (3D) topography parameters, surface microstructure geometric characteristics and other information can more fully evaluate the grinding quality of the slider raceway surface. In this paper, based on the 3D topography model of the abrasive particle distribution on the surface of the formed grinding wheel, the material removal mechanism between the abrasive particle and the raceway surface is analyzed. With the undeformed chip thickness distribution model as the intermediate variable, the 3D topography model of the slider raceway surface is established, and the model verification is carried out from the roughness and the geometric characteristics of the surface microstructure, respectively. At the same time, the surface microstructure is extracted from the topography model, and the effects of different grinding process parameters on the geometric characteristics such as the height to width ratio, depth to width ratio and distribution density of groove, convex peak and peak valley structures are studied. Results are shown that AS,TH increase from [0.05 0.6 μm] to [0.25 0.8 μm] and FGH grows from [0.11 1.05 μm] to [0.5 1.61 μm] when the grinding depth rises from 1 μm to 4 μm. AS, TH are firstly decreased from [0.17 0.61 μm] to [0.08 0.52 μm] and then increased to [0.26 0.78 μm], and the FGH declines from [0.34 1.01 μm] to [0.16 0.86 μm] and then increases to [0.51 1.38 μm] with the feeding speed is in [25, 28 m/min]. In addition, in the range of grinding wheel linear velocity [28, 34 m/s], the AS,TH decreases from [0.19 0.81 μm] to [0.1 0.55 μm] and the FGH decreases from [0.55 1.6 μm] to [0.2 1.1 μm]. This can prepare for the subsequent research on the impact of the topography characteristics on the friction coefficient and wear amount of the slider raceway surface.

Simulation analysis and evaluation of decontamination effect of different abrasive jet process parameters on radioactively contaminated metal

A new method of numerical simulating prediction and decontamination effect evaluation for abrasive jet decontamination to radioactively contaminated metal is proposed. Based on the Computational Fluid Dynamics and Discrete Element Model (CFD-DEM) coupled simulation model, the motion patterns and distribution of abrasives can be predicted, and the decontamination effect can be evaluated by image processing and recognition technology. The impact of three key parameters (impact distance, inlet pressure, abrasive mass flow rate) on the decontamination effect is revealed. Moreover, here are experiments of reliability verification to decontamination effect and numerical simulation methods that has been conducted. The results show that: 60Co and other homogeneous solid solution radioactive pollutants can be removed by abrasive jet, and the average removal rate of Co exceeds 80%. It is reliable for the proposed numerical simulation and evaluation method because of the well goodness of fit between predicted value and actual values: The predicted values and actual values of the abrasive distribution diameter are Ф57 and Ф55; the total coverage rate is 26.42% and 23.50%; the average impact velocity is 81.73 m/s and 78.00 m/s. Further analysis shows that the impact distance has a significant impact on the distribution of abrasive particles on the target surface, the coverage rate of the core area increases at first, and then decreases with the increase of the impact distance of the nozzle, which reach a maximum of 14.44% at 300 mm. It is recommended to set the impact distance around 300 mm, because at this time the core area coverage of the abrasive is the largest and the impact velocity is stable at the highest speed of 81.94 m/s. The impact of the nozzle inlet pressure on the decontamination effect mainly affects the impact kinetic energy of the abrasive and has little impact on the distribution. The greater the inlet pressure, the greater the impact kinetic energy, and the stronger the decontamination ability of the abrasive. But in return, the energy consumption is higher, too. For the decontamination of radioactively contaminated metals, it is recommended to set the inlet pressure of the nozzle at around 0.6 MPa. Because most of the Co elements can be removed under this pressure. Increasing the mass and flow of abrasives appropriately can enhance the decontamination effectiveness. The total mass of abrasives per unit decontamination area is suggested to be 50 g because the core area coverage rate of the abrasive is relatively large under this condition; and the nozzle wear extent is acceptable.

Fixed-Diamond Abrasive Wire-Saw Cutting Force Modeling Based on Changes in Contact Arc Lengths.

Monocrystalline silicon is widely used in the semiconductor market, but its hard and brittle physical properties make processing difficult. Fixed-diamond abrasive wire-saw (FAW) cutting is currently the most commonly used cutting method for hard and brittle materials due to advantages such as narrow cutting seams, low pollution, low cutting force and simple cutting process. During the process of cutting a wafer, the contact between the part and the wire is curved, and the arc length changes during the cutting process. This paper establishes a model of contact arc length by analyzing the cutting system. At the same time, a model of the random distribution of abrasive particles is established to solve the cutting force during the cutting process, using iterative algorithms to calculate cutting forces and chip surface saw marks. The error between the experiment and simulation of the average cutting force in the stable stage is less than 6%, and the errors with respect to the central angle and curvature of the saw arc on the wafer surface are less than 5% between the experiment and simulation. The relationship between the bow angle, contact arc length and cutting parameters is studied using simulations. The results show that the variation trend of the bow angle and contact arc length is consistent, increasing with an increase in the part feed rate and decreasing with an increase in the wire velocity.

Experimental investigation on deballing and surface finishing of selective laser melted 18Ni300 steel using polymer rheological abrasive medium

Additively manufactured metallic parts compete with casted and forged parts in physical and mechanical properties. However, the presence of various surface defects, such as balling and staircase effects, lack of fusion, surface undulations, etc., hinders the direct functional application of the as-built part and demands further post-processing. Abrasive flow finishing (AFF) is an extensively employed post-processing technique to finish additively manufactured parts. This process uses polymer rheological abrasive medium (abrasive medium) to finish internal and external surfaces. Even though significant research has been carried out on the surface finishing of selective laser melted metallic parts, the mechanism of material removal and surface finish improvement is not explored much. In the present work, the mechanism of deballing and surface finish improvement on selective laser melted 18Ni300 steel using the AFF process is studied. A newly developed polysaccharide-based abrasive media with monomodal and bimodal abrasive particle distribution are employed for finishing. At an extrusion pressure of 7.5 MPa, the influence of abrasive particle distribution and the number of finishing cycles on the amount of material removed and percentage change in surface roughness (% ΔRa) is observed. It was found that the abrasive medium with bimodal abrasive particle distribution resulted in more material removal and % ΔRa than monomodal. Surface roughness reduction of up to 93% was obtained using the abrasive medium with bimodal abrasive particle distribution. It was noticed that the loosely adhered powder particles were removed within the initial 15 cycles, and the balling effect was completely eliminated within 75 cycles. After 375 cycles, the as-built side surface was free from all other surface defects, such as micro-cracks, shallow pits, material ridges etc. Based on the obtained results, a suitable material removal mechanism in selective laser melting parts using the AFF process was proposed.

Finishing performance of polyurethane-based flexible tools fabricated using solvent casting and particulate leaching method

Oxygen-free high thermal conductivity (OFHC) copper is a common material for mirrors in different optical applications. As it is a soft material and easy to scratch, the nanofinishing using traditional finishing processes is difficult. A flexible abrasive tool that can adapt to the shape of the component and apply uniform and gentle pressure is required to achieve a high-quality surface finish on the soft materials. Flexible abrasive tools are fabricated using the solution casting and dissolution method with open porous microstructure and uniformly dispersed silicon carbide particles in a polyurethane polymer matrix. Mechanical and finishing characteristics of the fabricated tools are obtained under dry and wet conditions. The developed tools are self-lubricating and self-replenishing, reducing tool wear and eliminating burn marks on finished surfaces. Scanning electron micrographs and energy dispersive spectroscopy are used to investigate the tool microstructure and abrasive particle distribution before and after finishing. The mechanical behaviour of tools is studied using a dynamic mechanical analyser. Porosity is measured using the interconnected void volume, and fluid absorption rate is calculated through weight measurement before and after fluid absorption. The surface finish of finished surfaces is analysed using an optical surface profilometer. Results show that the flexible abrasive tool performs the best under wet conditions. In a single pass, a wet salt-leached tool achieved a reduction of 42.2 % on a surface having a lower initial roughness, whereas a wet pure polymer tool achieved a reduction of 45.7 % on a surface having a higher initial roughness. Finally, areal surface roughness of 34 nm is achieved in 16 mins of finishing experiment using pure polymer tool followed by salt-leached tool.

Simulation analysis of the decontamination effect of different nozzles abrasive jet based on CFD-DEM

To study the effect of three different types of nozzles (straight conical, Venturi, and streamline) on the decontamination effect of radioactively contaminated metals abrasive jet, the gas-solid two-phase flow in the abrasive jetting process is numerically simulated by the method of CFD-DEM coupling simulation. The coverage and distribution uniformity of abrasive particles, the impact velocity, and the wear of the nozzle itself are focused on, and the rationality and reliability of the simulation experiment method and the evaluation method of the experimental results are proved by the verification experiments. The results show that the Venturi nozzle is more suitable for the decontamination of radioactively contaminated metals because it has the advantages of uniform abrasive distribution, high abrasive impact velocity, and good nozzle wear. The nozzle is mainly subjected to low-angle micro-cutting erosion wear, so when selecting nozzle materials, more emphasis should be placed on high-hardness materials to resist micro-cutting wear. The impact distance has a very obvious impact on the decontamination effect of the abrasive. In the decontamination process, the impact distance should be set reasonably, and the uniformity of the abrasive particle distribution should be fully considered to ensure the decontamination effect.

Surface finishing of aluminium 6061 using fabricated flexible abrasive tool

The present work uses the solvent casting method to fabricate a flexible polyurethane tool embedded with silicon carbide (SiC) abrasive particles. Different weight fractions of SiC particles are used to fabricate different tools. Tools are characterized by scanning electron microscope, dynamic mechanical analyzer, and shore hardness tester to study the pore structure, distribution of abrasive particles and mechanical behaviour. Finishing experiments are carried out on 6061 aluminium alloy to check the performance of the fabricated tools. Initial results indicate that these tools can be used as alternatives to other finishing techniques for achieving the desired level of finishing at a rapid rate and a minimal cost.

Analysis of Tool Wear and Counter Surface Roughness in the Flexible Abrasive Tool Finishing

This work uses the solvent casting method to fabricate an elastomeric tool with polyurethane as the base material and silicon carbide (SiC) as embedded abrasive particles. The distribution of abrasive particles and the pore structure in the fabricated tools are analyzed. The fabricated tools are porous in nature and have self-replenishing as well as self-lubrication properties. Aluminum 6061 alloy and electroless nickel-phosphorus plating having different initial roughness are selected as workpieces to study the wear mechanisms and loading of the flexible abrasive tool. The rotational speed of the tool, tool compression, and feed rate are fixed input process parameters. Total finishing time, sliding distance, and roughness are varied to obtain output responses. The workpiece material is also taken into account as a variable parameter in this study. These materials are classified as different counter surfaces as their surface roughness and mechanical properties vary. The finishing time and sliding distance for these counter surfaces differ in order to relate their effects on tool wear and loading. The nickel-plated surface shows a higher percentage reduction in surface roughness of 92% as compared to the aluminum surface, with a 62% reduction in surface roughness. The coefficient of friction, wear, and tool condition are analyzed to understand the mechanism of tool wear and tool loading. In this process, both two-body and three-body abrasions occur simultaneously and continuously.

Experimental and simulation study on the influence factors of abrasive water jet machining ductile materials

Abrasive water jet (AWJ) is a type of cold processing technology, and there are many factors affecting its machining effect. In this paper, a coupled Finite Element Methods-Smoothed Particle Hydrodynamics (FEM-SPH) numerical model was established to investigate the key influencing factors of AWJ machining ductile materials. The abrasive particles in the model were shaped as irregular polyhedrons, and the material properties of the abrasive particles as well as the influence mechanism of the fluid–structure interaction between the abrasive particles and the water were considered. The relative error range of experimental measured results and simulation predicted results is 22.77%–36.55%. Then, the effects of content and distribution of abrasive particles, the jet working pressure P, the traverse rate of nozzle Vtrav and the impingement angle α were systematically and quantitatively evaluated through two-way verification of experiments and simulations. It was found that: (i) Effects of stand-off distance (SOD) on the kerf profile and the quality of kerf surface was essentially determined by the content and distribution of abrasive particles. As the increase of SOD, the jet divergence gradually increases, and the kerf profile gradually changes from “U-shaped” to “V-shaped”. (ii) Experiments and simulations demonstrate that the P has a linear increasing relationship with the maximum depth h of kerf profile, and the Vtrav has a linear decreasing relationship with the maximum depth h, while it has a linear increasing relationship with the jet trailing angle β, which was independent of the ductile material type. (iii) The combined effect of Vtrav and α affects geometric parameters and surface quality of the kerf profile, under the same P, the depth of the cut surface obtained by backward cutting is only 72.1% of that of the forward cutting, while the quality of the cut surface of former one is higher than the latter one.

Modeling method and experimental study on the random distribution of abrasive particles in the jet cutting process

The distribution of abrasive particles in fluids is an important research topic in the study of abrasive waterjet cutting processes. However, it is impossible to obtain the accurate distribution law and influencing factors by performing only experiments; therefore, it is necessary to study abrasive waterjet cutting processes with the help of numerical models. The existing numerical models usually adopt the form of artificial settings for the distribution of abrasive particles in fluid. This method cannot accurately simulate the random distribution of particles. In this paper, the random algorithm method is used to simulate the impact azimuth and the random distribution of abrasive particles in water. The smoothed particle hydrodynamics (SPH) method is used to simulate the distribution of abrasive particles and the process of jet impingement. The influence of the particle distribution on the simulation results is studied. Comparisons show that the dent formed by the jet impinging on the target with random abrasive particles is similar to the dent from the actual cut, and the contour distribution of the dent is more uniform than that of the cut. The simulation results obtained by the SPH method are accurate.

Roughness Prediction and Performance Analysis of Data-Driven Superalloy Belt Grinding

Abrasive belt grinding has unique advantages in avoiding machining defects and improving surface integrity while grinding hard materials such as superalloys. However, the random distribution of abrasive particles on the abrasive belt surface is uncontrollable, and chatter and machining errors accompany the machining process, leading to unclear mapping relationship between process parameters and surface roughness, which brings great challenges to the prediction of surface roughness of superalloy. Traditional empirical equations are highly dependent on empirical knowledge and the development of scientific theories and can only solve problems with relatively simple and clear mechanisms, but cannot effectively solve complex and mutually coupled problems. The method based on data-driven patterns has a better idea for mining the implicit mapping relationship and eliminating the uncertainty of complex problems. This study presents a data-driven roughness prediction method for GH4169 superalloy. First, a superalloy grinding platform is built. According to the grinding empirical equation, the mapping relationship between process parameters and surface roughness is analyzed, and a prediction model is established based on the error back propagation (BP) algorithm. Second, genetic algorithm (GA) and particle swarm optimization (PSO) algorithm are used to optimize the weights and thresholds of the neural network, and the global optimal solution is obtained. Finally, the prediction performance of different algorithms is compared. The results show that the non-uniform absolute errors of the BP algorithm, GA-BP algorithm, and PSO-BP algorithm are 0.12, 0.085, and 0.078, respectively. The results show that the roughness prediction algorithm based on PSO-BP is more suitable for GH4169 superalloy.

Effect of nozzle pressure ratios on the flow and distribution of abrasive particles in abrasive air jet machining

Effect of nozzle pressure ratio (NPR) on the flow and distribution of abrasive particles was investigated to improve supersonic abrasive air jet machining (AAJM) effect. The supersonic air-particle flow was simulated via CFD-DEM modeling, which was verified by AAJM experiments. It was concluded that NPR determined the acceleration and distribution of particle flow by controlling the structure and turbulent kinetic energy of the air jet free-flow field. When NPR = 1.12, the particle flow field had a longer stable region and a higher particle velocity, and the radial distribution resembled an n-shape. Further, in AAJM experiments, when the material was fixed in the stable region of particle flow field, the impact stresses were relatively high and uniformly distributed. Thus, when NPR = 1.12, the target material is fixed in the stable region of the abrasive particle flow, and the target material can obtain a better machining effect in the AAJM.

Theoretical and experimental investigation on surface generation and subsurface damage in fixed abrasive lapping of optical glass

Fixed abrasive lapping (FAL) is a promising technology increasingly used for finishing optical mirrors and molds in a number of materials due to its high finishing efficiency, environmental friendliness, and relatively better surface and subsurface quality. A theoretical model for fixed-abrasive lapping of optical glass was developed in this paper by using indentation fracture mechanics, contact mechanics, mathematical statistics, lapping kinematics, and convolution iterative principle to provide an enhanced scientific understanding of the surface microtopography generation and subsurface damage (SSD) control mechanisms. In the modeling, the influence of the shape, size, and spatial distribution of abrasive particles and the ductile and brittle removal mechanisms of the material were considered. A series of lapping experiments on fused silica glass was carried out to quantitatively analyze the feasibility and accuracy of the model and study the influence mechanism of process parameters on the surface and subsurface state. Results indicated that the models could well predict the surface micromorphology and the SSD depth, and the range of sharpness angle of abrasive particles and tool load affected the predicted SSD range. In addition, the material removal mechanism and lapping tool wear characteristics were revealed by the surface structure and element component analysis. Finally, the FAL process was optimized by the evaluation indices of material removal rate (MRR), surface roughness, and SSD.

Research into the Disintegration of Abrasive Materials in the Abrasive Water Jet Machining Process.

The size and distribution of abrasive particles have a significant influence on the effectiveness of the cutting process by the high-speed abrasive water jet (AWJ). This paper deals with the disintegration intensity of abrasive materials in AWJ cutting during the creation of the abrasive jet. An evaluation of the abrasive materials was performed after forming in the cutting head was carried out and grain distribution was evaluated using the geometric and logarithmic Folk and Ward method. The influence of the abrasive concentration of abrasive materials such as alluvial garnet, recycled garnet, corundum, and olivine on grain distribution was studied. A recovery analysis was also carried out and the recycling coefficient was determined for each abrasive material tested.

Quantitative Measuring Analysis Method and Mechanism of Wear Particle Settlement

The size and distribution of wear particle in lubricating oil, as important numerical information available in ferrography, is one of the key indexes in wear diagnosis. In this paper, a new method for measuring the size and distribution of abrasive particles is proposed. First, all the abrasive fluid is left standing until all the abrasive particles are precipitated to the bottom. Then, the measuring container is inverted and the whole precipitation process of abrasive particles is recorded by magnetic induction instrument. And according to the precipitation analysis of the wear particle, the following results were obtained:1) At the initial stage of the particle settlement, the gravity, the buoyancy and the drag force of the oil achieve balance quickly, the time and distance of the wear particle moving at a constant velocity can be neglected. 2) The settling velocity is related to the diameter and specific gravity of the wear particle as well as the specific gravity and viscosity of the oil, the distribution of the wear particle is proportional to the square of the diameter of the particle, using the magnetic induction technology, the distribution of particle can be measured by settling time for different sizes of wear particles. 3) Measure the wear particle oil directly, there are different sizes of particles settlement in the bottom at the same time, which causes the difficulty in identifying the size of the particle settlement. The particle should be settled first, and then inverted, settling the particle in accordance with the order from large to small, which facilitates the measurement of different sizes of the particles, different times correspond to different sizes of the particles. 4) The bigger the particle is, the more accurate the measurement and counting is, the smaller the particle is, the bigger the error is.

Structure and properties of particles/rubber composites applied on functionally graded lapping and polishing plate

Abstract To obtain uniform and controllable material removal on hard and brittle materials, a novel processing technology with functionally graded lapping and polishing plate (FG-LPP) was proposed. Taking application of particles/rubber composites and adjustable contact stress of workpiece as key point, the abrasive particles and rubber were mixed with different mass ratios; then the FG-LPP was formed with characteristics of required quasi-continuous distribution of Young’s modulus in the radial direction by two-step processing technique. The properties of Young’s modulus, loss factor, and glass transition temperature of different particles/rubber composites were tested and calculated. Through comparison and analysis, silicon carbide (SiC)/chloroprene rubber (CR) composites are the suitable application object of FG-LPP. Moreover, by laser particle size analyzer, scanning electron microscope, and X-ray diffraction, the size distribution of abrasive particles, micromorphology of particles/rubber composites and their phase composition were tested respectively to better reveal the structure and properties. The test results indicate that under the action of ZnO and MgO, CR undergoes a vulcanization reaction gently and forms a spatial three-dimensional structure. Thus, it helps to increase the intermolecular distance and weaken the intermolecular forces because the NO is easy to enter the CR molecules, which improves the intermiscibility between SiC and CR.

The effect of shape and size distribution of abrasive particles on the volume loss of enamel using micro-abrasion

Wear of enamel during tooth brushing is a complex phenomenon with many variables affecting the level of loss. Toothpastes contain angular abrasive particles at a concentration of 12%–15% v/v abrasive designed to remove biofilm and extrinsic stains that also have the potential to harm the tooth enamel resulting in wear. Toothpastes contain multi-modal particles in the size range of 4μm–12μm. The aim of this paper is to develop an understanding of the relationship between the combined effects of particle shape, size, size distribution and load on the volume loss of enamel under abrasive testing. Micro-abrasion testing using a Nylon ball, to simulate the toothbrush, was undertaken on hydrated bovine enamel disks using volume concentrations of 5% – 20% v/v alumina and silica. Post experimental surface analysis was performed to analyse the wear scar morphology and groove analysis. The synergistic effects were calculated of bimodal particles vs. mono sized particles. Mono-sized particles as compared to bimodal, appeared to give the best outcome and least wear of enamel. A positive synergy existed for the alumina and silica bimodal tests, indicating the bimodal particle distribution was causing more wear than the mono-sized particles. The mechanism of material removal was a combination of crushing and fracture of the enamel prisms (rods), followed by micro-chipping and removal of enamel. The magnitude and the distribution of the particle sizes is the most dominant factor in determining the levels of wear, with smaller particles and narrow distributions of the particle size reducing the magnitude of wear. The shape of the particles is also a major factor influencing wear, with the spherical tests generating lower wear rates than the angular tests.

Theoretical and experimental analysis of material removal and surface generation in novel fixed abrasive lapping of optical surface

Abstract Fixed abrasive machining, which overcomes the lack of determinacy and efficiency of current loose abrasive polishing or lapping processes, is an alternative technology for fabricating large-aperture aspheric surfaces with high finishing efficiency and high-quality surface finish. A novel fixed abrasive lapping (NFAL) tool, which combines computer-controlled optical surfacing and conventional fixed abrasive lapping process, is introduced in this study to produce off-axis aspheric surfaces efficiently while surface state is controlled and subsurface damage (SSD) is avoided. The removal mechanism analysis shows that fused quartz glass is primarily removed in ductile regime and the SSD depth is 14.7 μm when the tool load is 25 N. The material removal volume is linear with the machining time under the ductile removal mode. The material removal and surface generation models are developed on the basis of the calculation of the spatial distribution of abrasive particles, the pad–particle–workpiece interactions, the single-particle abrasion mechanism, and the linearly cumulative removal of surface generation in the NFAL process. The models are verified through a series of spot and surface lapping experiments. Results show that the theoretical model can be successfully used to predict and optimize the NFAL process. The spot lapping experiments indicate that the material removal volume is linear with the rotation speed, and the maximum depth is limited to the specific value that depends on the stiffness of lapping tool. The surface roughness Ra and Rz values of the measured and simulated surface data decrease with the increase in feed rate and increase with the increase in raster spacing. The power spectral density analysis indicates that high feed rate can distinctly improve the high-frequency errors, and the selection of the raster spacing can principally affect the low-frequency and middle-spatial frequency errors.

Investigation on the polishing of aspheric surfaces with a doughnut-shaped magnetic compound fluid (MCF) tool using an industrial robot

Aspheric elements have become essential optical surfaces for modifying optical systems due to their abilities to enhance the imaging quality. In this work, a novel method employing a doughnut-shaped magnetic compound fluid (MCF) polishing tool, and an industrial robot was proposed for polishing aspheric surfaces. Firstly, investigations on the MCF tool, including the formation process and geometry, were conducted to form an appropriate polishing tool. The distribution of abrasive particles was observed using SEM and EDX mapping. Thereafter, a conic workpiece constructed from 6061-aluminum alloy was selected as the workpiece, which was used to discover the effects of the parameters on the polishing ability of aspheric surfaces. Finally, a polishing experiment was conducted with an aspheric element under the optimized conditions. The obtained results are shown as follows. (1) A relatively regular MCF tool was obtained when the eccentricity (r), amount of MCF slurry supplied (V), revolution speed of the MCF carrier and magnet (nc and nm, respectively) were given at appropriate values. (2) Abrasive particles entrapped in or attached to the clusters were observed abundantly on the MCF tool sample. (3) The surface profile of the conic workpiece after 60 min of polishing indicated that material was removed evenly, and an annular polishing area was attained. Meanwhile, a higher material removal rate and better surface roughness were achieved with a smaller working gap (h) and larger volume of the MCF slurry supplied (V). (4) The roughness (Ra) of the aspheric surface decreased from 49.81 to 10.77 nm after 60 min of polishing. The shape retention obtained a Pearson correlation coefficient (Pcc) of 0.9981, which demonstrated that this novel method is appropriate for polishing aspheric elements.

Study on polishing slurry waste reduction in polishing monocrystalline silicon based on ultrasonic atomization

It is found that in order to ensure the polishing slurry involved in polishing process is sufficient, the supply of polishing slurry has to be excessive in conventional polishing process. However, actually only a limited amount of polishing slurry is involved in polishing process compared with the supplied polishing slurry, and the overwhelming majority is directly discharged which increases waste emissions. On the other hand, the issue of industrial waste is increasingly attracting scientific and public attention due to the magnitude of the problem in China, and various types of polishing slurries will cause serious pollution to rivers and soils. This paper focuses on a novel and successful polishing slurry waste reduction method which realizes waste reduction on the premise of ensuring the polishing performance. The proposed method is based on ultrasonic atomization, which can make the polishing slurry with low supply rate form a soft and low velocity fine mist spray and realize the even distribution of abrasive particles in slurry, and is called ultrasonic atomization polishing. In order to prove the feasibility of this waste reduction method, this paper has proved that (i) the introduction of ultrasonic atomization contributes the improvement of surface quality and polishing efficiency and (ii) ultrasonic atomization polishing can greatly realize polishing slurry waste reduction, moreover, multi-objective optimization scheme of polishing parameters for ultrasonic atomization polishing is obtained, which are all of great significance to guide the waste reduction in actual production.