Theoretical and experimental investigation on surface generation and subsurface damage in fixed abrasive lapping of optical glass

Abstract

Fixed abrasive lapping (FAL) is a promising technology increasingly used for finishing optical mirrors and molds in a number of materials due to its high finishing efficiency, environmental friendliness, and relatively better surface and subsurface quality. A theoretical model for fixed-abrasive lapping of optical glass was developed in this paper by using indentation fracture mechanics, contact mechanics, mathematical statistics, lapping kinematics, and convolution iterative principle to provide an enhanced scientific understanding of the surface microtopography generation and subsurface damage (SSD) control mechanisms. In the modeling, the influence of the shape, size, and spatial distribution of abrasive particles and the ductile and brittle removal mechanisms of the material were considered. A series of lapping experiments on fused silica glass was carried out to quantitatively analyze the feasibility and accuracy of the model and study the influence mechanism of process parameters on the surface and subsurface state. Results indicated that the models could well predict the surface micromorphology and the SSD depth, and the range of sharpness angle of abrasive particles and tool load affected the predicted SSD range. In addition, the material removal mechanism and lapping tool wear characteristics were revealed by the surface structure and element component analysis. Finally, the FAL process was optimized by the evaluation indices of material removal rate (MRR), surface roughness, and SSD.