It is demonstrated in this study that transmission electron microscopy can make an extremely valuable contribution towards the characterization of surface films and coatings. It is also shown that heterochemical layers which develop beneath the surface of the native scale on alloys can be extracted for examination by a suitable combination of dissolution reagents. Thin layers of native oxide are shown to be generated at the surfaces of nickel and Fecralloy steel when ceria sol coatings are applied to them.