Displacement Magnification Mechanism Research Articles

Proposal of an Equal-Stiffness and Equal-Stroke 2D Micro-Positioning Platform Driven by Piezoelectric Actuators

Micro-positioning platform plays an important role in the field of precision positioning such as microelectronics, robotics and biomedicine. This paper proposes an equal-stiffness and equal-stroke 2D micro-positioning platform, which is driven by piezoelectric actuators. The overall structure of the 2D micro-positioning platform adopts a nested structure and the displacement magnification mechanism adopts two hourglass displacement magnification mechanisms. The displacement magnification ratio of the hourglass displacement magnification mechanism was studied, and its structural parameters were optimized. Static stiffness analysis and simulation analysis of the micro-positioning platform were carried out. The simulation stiffness of the micro-positioning platform in the XY direction is 46873 N/m and 46832 N/m respectively. The experimental prototype of the micro-positioning platform was built. Through the measurement experiment with the prototype, the maximum stroke of the micro-positioning platform in the XY direction is 489 μm and 493 μm respectively; the maximum coupling ratio in the XY direction is 2.38% and 2.70% respectively. The research indicates that the micro-positioning platform had the characteristics of small size, equal long stroke, equal stiffness and low coupling ratio in the XY direction.

Vibration quenching device using Hula-Hoop and displacement magnification mechanism

Vibration quenching device using Hula-Hoop and displacement magnification mechanism

Vibration quenching device using Hula-Hoop and displacement magnification mechanism

Vibration quenching device using Hula-Hoop and displacement magnification mechanism

Vibration quenching device using Hula-Hoop and displacement magnification mechanism

Vibration quenching device using Hula-Hoop and displacement magnification mechanism

Development of Visualization Washer Unit for Detecting Bolt Loosening by Using Displacement Magnification Mechanism of Lever Type

Development of Visualization Washer Unit for Detecting Bolt Loosening by Using Displacement Magnification Mechanism of Lever Type

A Study on Precision Stage with Displacement Magnification Mechanism Using Flexure-Based Levers

This study presents a precision stage driven by a piezoelectric actuator and equipped with a displacement magnification mechanism for the purpose of easy displacement measurement. The displacement magnification mechanism consists of flexible hinges and lever mechanisms. The developed stage is able to provide accurate measurement by virtue of the displacement magnification mechanism, but it is exposed to severe residual vibration. In order to overcome the drawback, this study develops a method for reducing residual vibration by using a simulation model for the stage system that takes into account the dynamics of the system and the hysteretic characteristics of the piezoelectric actuator. The Bouc-Wen model is employed to represent the hysteretic characteristics of the actuator. A comparison between simulation and experiment is made to find the best simulation model for the developed system. Input shaping is applied to eliminate the residual vibration from the stage. An improved input shaper is designed to overcome the ineffectiveness of input shaping due to the hysteresis by using the proposed simulation model. Simulations and experiments prove that the proposed simulation model is very useful to investigate the system and that the proposed stage can provide accurate positioning with small residual vibration.

S1710103 油圧による変位拡大機構を用いた安全確認型ねじの緩み検出機構に関する研究([S171]産業・化学機械や設備の材料・検査技術)

S1710103 油圧による変位拡大機構を用いた安全確認型ねじの緩み検出機構に関する研究([S171]産業・化学機械や設備の材料・検査技術)

W042001 スマート構造を用いた高精度宇宙構造システムの実現に向けて(【W04200】知的材料・構造システムの現状と今後の展開,機械材料・材料加工部門企画,ワークショップ)

In order to realize a high accuracy space structure system, shape and vibration controls using smart structures are studied. Two prototypes of smart reflectors were developed and investigated. One was a long smart beam system equipped with Macro Fiber Composites (MFCs) and the other was a smart reconfigurable reflector equipped with smart actuators. The smart actuator was designed for the smart reconfigurable reflector and it consisted of a piezoelectric stack actuator and a displacement magnification mechanism. Experiments of the shape and vibration controls of the long smart beam were carried out and their performance were investigated. The performance of the smart actuator was also investigated through numerical simulations and experiments. The results are reported in this paper.

On-chip microrobot for investigating the response of aquatic microorganisms to mechanical stimulation

In this paper, we propose a novel, magnetically driven microrobot equipped with a frame structure to measure the effects of stimulating aquatic microorganisms. The design and fabrication of the force-sensing structure with a displacement magnification mechanism based on beam deformation are described. The microrobot is composed of a Si-Ni hybrid structure constructed using micro-electro-mechanical system (MEMS) technologies. The microrobots with 5 μm-wide force sensors are actuated in a microfluidic chip by permanent magnets so that they can locally stimulate the microorganisms with the desired force within the stable environment of the closed microchip. They afford centimetre-order mobility (untethered drive) and millinewton-order forces (high power) as well as force-sensing. Finally, we apply the developed microrobots for the quantitative evaluation of the stimuation of Pleurosira laevis (P. laevis) and determine the relationship between the applied force and the response of a single cell.

1N1524 変位拡大機構を用いた広範囲高速AFMスキャナーの開発(バイオイメージング1,第49回日本生物物理学会年会)

1N1524 変位拡大機構を用いた広範囲高速AFMスキャナーの開発(バイオイメージング1,第49回日本生物物理学会年会)

1A2-B09 オンチップビオトープ : マイクロロボットによる珪藻の力学的刺激応答計測(ナノ・マイクロ流体システム)

In this paper, we newly propose an on-chip biotope capable of culturing, manipulation, and sensing to figure out functions and mechanical property of microorganisms. To evaluate the applied force to P. laevis by MMT (Magnetically Driven Microtool), the frame structure is attached to the tip of MMT. The design, fabrication, and evaluation of the force sensing structure with a displacement magnification mechanism of the beam deformation are shown. Finally, the basic characteristics of the P. laevis are investigated by using the developed MMT which is placed into the microchip.

磁気駆動マイクロツールによる珪藻のオンチップ刺激特性評価

In this paper, we newly propose an on-chip sensing of stimulant property of Pleurosira laevis (P. laevis) by magnetically driven microtool (MMT) which can stimulate the single cell in the microchip. To measure the applied force by MMT, the frame structure is attached to the tip of MMT. The design and fabrication of the force sensing structure with a displacement magnification mechanism of the beam deformation is shown. We also show the fabrication method to avoid the friction between the force sensing structure and the substrate of the microchip. By using this method, the MMT with very thin structure is easy to be assembled in the microchip without any damage. Through the basic experiments, the advantage of the proposed layer fabrication technique and the performance of the force sensing is confirmed. Finally, the basic characteristics of the P. laevis are investigated by using the developed MMT which is placed into the microchip.

Examination of Sandwich-Type Multidegree-of-Freedom Spherical Ultrasonic Motor

A sandwich-type multidegree-of-freedom (MDOF) spherical ultrasonic motor (SUSM) is newly proposed. The motor consists of a spherical rotor and two stator vibrators holding the rotor. This structure has both a rotor support and a preload mechanism. The stator excites five vibration modes, and the rotor can rotate on three axes. An experiment of a torque composition of two stators was carried out. The contact surface between the rotor and the stators forms a spherical surface. Moreover, a displacement magnification mechanism, which was used in the former model to rotate on the Z-axis, is no longer necessary. Hence the stator is simpler in construction than the former model. In this paper, we describe the construction and the operating principle of the MDOF ultrasonic motor, modal analysis results for the stator, and some measurement results from trial manufacturing. The miniaturization of the motor and increase in torque were successfully realized.

Fast drive of displacement magnification mechanism with flexure hinge using loading type impact damper

A displacement magnification mechanism which uses flexure motion guide using elastic hinges can realize smooth frictionless motion but has poor vibration damping capability. An impact damper is a damping mechanism which uses collision energy to dissipate vibration energy. If the damper is used for vibration control of the flexure mechanism, it may be able to dissipate unexpected vibration without killing the merits of the flexure mechanism. In the paper, a loading type impact damper is applied to settle down transient vibration of a displacement magnification mechanism. We investigate differences of damping effect by setting conditions of the damper. It is shown that the impact damper can eliminate residual vibration at step response effectively without steady state error. The experimental displacement magnification mechanism with impact damper can settle down less than 1/5 of the response without the damper under appropriate setting conditions. Influence of natural frequency ratio between damper and displacement magnification mechanism is investigated. Influences of indentation at impact point are also examined.

1P339 変位拡大機構を用いた広範囲高速AFMスキャナーの開発(バイオエンジニアリング,第48回日本生物物理学会年会)

1P339 変位拡大機構を用いた広範囲高速AFMスキャナーの開発(バイオエンジニアリング,第48回日本生物物理学会年会)

Development of a closed‐loop micro‐/nano‐positioning stage with small tilting angles

This study is to develop a PC‐based closed‐loop micro‐/nano‐positioning stage with small tilting angles. The developed system mainly consists of a piezoelectric actuator, a displacement magnification mechanism, a ball joint, a micro‐/nano‐positioning stage body with four folded leaf springs, a fiber optic interferometer system, and a PC. After executing the optimization analyses of the stress, the displacement, and the frequency, using ANSYS software, the dimensions of the stage body have been designed and determined. A set of software, programmed using the LabView programming interface, was developed to conduct the PID control of the positioning system. According to the test results, the maximum tilting angles using the ball joint were about 1 arc‐second within a travel of 35 μm. A positioning capability of 10 nm under a tracing speed of 5 nm/s of the developed closed‐loop positioning stage, was possible based on the test results.

3251 インパクトダンパを用いた変位拡大機構の整定(S38-2 機構の開発とシミュレーション(2),21世紀地球環境革命の機械工学:人・マイクロナノ・エネルギー・環境)

A displacement magnification mechanism for piezoelectric actuator usually adopts elastic guide such as parallel translation mechanism with flexure hinges in order to avoid influence of stick slip motion caused by solid friction. Therefore the mechanism has poor damping ability. Residual vibration makes settling time long when the mechanism is driven quickly. An Impact damper uses energy of collision to dissipate vibration energy and does not use fiction force. It can work without spoiling the merit that the displacement magnification mechanism has no stick slip motion. The authors tried to apply the impact damper to displacement magnification mechanism and investigated differences by setting conditions of the damper. The effects of the damper are presented in the report.

B18 変位拡大位置決め制御機構の機構形状と制御系の同時最適設計(OS12-1 同時最適化)

B18 変位拡大位置決め制御機構の機構形状と制御系の同時最適設計(OS12-1 同時最適化)

Displacement Analysis of Large-Deflective Elastic Hinge for Positioning Mechanisms.

In order to perform a precise positioning, flexure joints having backlash-free and frictionless are suitable in micro positioning mechanisms. In the case of flexure joints, relative angular displace- ments at the joints are small. Therefore many flexure joints are used to obtain a large output displacement from a small input displacement in the mechanisms, and they are used within the linear elastic region. In this paper, large-deflective elastic hinges are proposed instead of revolute pairs. They are movable connections between links, and can eliminate an input displacement magnification mechanism and a stress concentration problem at joints. As a result, the length of pseudo-links that considered with geometric relation of hinge's deformation is changed. To solve the nonlinear large- deflective elastic hinge problem under a concentrated load and a moment, the large deflection theory, namely, elastica is used. Also, a concept of movable pseudo-revolute pair to analyze a hinge in the kinematic aspect is proposed, and the validity of the concept is confirmed theoretically and experimentally.