Abstract
In this paper, we newly propose an on-chip sensing of stimulant property of Pleurosira laevis (P. laevis) by magnetically driven microtool (MMT) which can stimulate the single cell in the microchip. To measure the applied force by MMT, the frame structure is attached to the tip of MMT. The design and fabrication of the force sensing structure with a displacement magnification mechanism of the beam deformation is shown. We also show the fabrication method to avoid the friction between the force sensing structure and the substrate of the microchip. By using this method, the MMT with very thin structure is easy to be assembled in the microchip without any damage. Through the basic experiments, the advantage of the proposed layer fabrication technique and the performance of the force sensing is confirmed. Finally, the basic characteristics of the P. laevis are investigated by using the developed MMT which is placed into the microchip.
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