We have explored some of the features of ion-plasma nitriding the inner surface of narrow extended metal tubes by the plasma of a non-self-sustained glow discharge initiated by a focused electron beam in the forevacuum pressure range. The influence of electron beam current on the discharge parameters was determined. We found a non-monotonic dependence of plasma density, nitrogen content in the nitrided surface layer, and layer microhardness on discharge burning voltage. The microhardness of the inner surface of the nitrided tubes reaches values of 1500 kgf/mm<sup>2</sup> for AISI 321 stainless steel and 700 kgf/mm<sup>2</sup> for alloy carbon steel AISI 5135.
Read full abstract