Parameters and ion mass-to-charge composition of a high-power impulse magnetron discharge with electron injection

Abstract

We have explored the effect of electron injection on the burning conditions and parameters of a high-power impulse magnetron sputtering discharge, including the ion mass-to-charge composition of the discharge plasma. We find that with stabilized discharge burning voltage, electron injection leads to a significant increase in the discharge current and sustains discharge operation in the low pressure regime, but also leads to a lower fraction of metal ions in the plasma. By using a reflecting electrode, conditions are created that provide transport of the injected electron flux directly into the region of intense ionization, and one can preserve the fraction of metal ions in the plasma corresponding to the self-sputtering mode, and also decrease the limiting operating pressure.