Self-standing polycrystalline diamond films fabricated by chemical vapor deposition, which were transparent up to the intrinsic band edge of ∼5.5 eV, were implanted with boron negative dimer ions (B2−) of 60 keV at various fluences ranging from 1×1014 to 3×1017 B/cm2. Even at the lowest fluence of 1×1014 B/cm2, a weak color darkening was observed by the naked eye, indicating the optical absorption due to damage, not to implants. The subbandgap absorption tail increases with the fluence to the powers of ∼0.5 and ∼0.2 in the fluence regions lower and higher, respectively, than the transition fluence of ∼1×1016 B/cm2. The implanted regions also show large surface swelling of up to ∼60 nm in height. The swelling shows the same two-step power-law dependence with the same transition fluence. The same two-step power-law fluence dependence with the same transition fluence is also observed in the intensity of the defect Raman band around 1520 cm−1. From the good agreement between the estimated volume change due to graphitization and the measured swelling, the transition fluence is ascribed to the fluence where all the diamond structures in the implanted layer are transformed to graphitelike structures.
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