Impedance spectroscopy of copper phthalocyanine (CuPc)/n-Si hybrid solar cell was studied. The dielectric relaxation mechanism of the solar cell was analyzed by Cole–Cole plots, indicating the presence of a single relaxation mechanism. The equivalent circuit model consisting of a parallel resistor and capacitor in series with a resistor was found to give a well fit to the experimental data. The conduction mechanism was suggested to be a space-charge limited current with exponential trap distribution. Beside, the dielectric relaxation time of the device was decreased with increasing applied bias voltages.