ABSTRACT Hydraulic electrostatic actuators have become a research hotspot for their inherent flexibility and safety of human-machine interaction. This paper aims to combine the characteristics of dielectric elastomers and fluid actuators, enhancing the dielectric constant and breakdown field strength by modifying Al2O3 on the surface of nanostructured BaTiO3 and in order to develop a hydraulic electrostatic actuator with silicone rubber as the matrix material. Single-factor experiments were firstly conducted to confirm the range of three factors affecting the actuation strain of the actuator: BaTiO3@Al2O3 content, thickness of the silicone rubber elastomer film, and pre-stretching ratio coefficient. The response surface methodology was used to study the interactive influence of the above three influencing factors on the actuation strain. It was obtained that A has an insignificant influence on the actuation strain, AB has a significant influence on the actuation strain, and B, C, AC, and BC have a highly influence on the actuation strain. Maximizing actuation strain as the optimization objective yielded the combination results of each factor: BaTiO3@Al2O3 content of 2.57%, thickness of 0.60 mm, and pre-stretching ratio coefficient of 2.50. Actuation strain tests were conducted with optimized parameters under no-load. The experimental results of the actuation strain test show that the relative error between the test value and the model prediction value of 16.47% is less than 5%, and the optimization model results are reliable. The optimized hydraulic electrostatic actuator was tested for actuation strain and electrical performance under different loads. The experiment showed that the maximum actuation strain of the hydraulic electrostatic actuator was 17.20% under a load of 100 g. The critical breakdown current of the actuator ranged from 115 μA to 130 μA, and the maximum electromechanical conversion efficiency of the actuator under different loads was 67.93%. Finally, a joint actuating device was developed based on the structure of the actuator, amplifying the output displacement of the actuator to 30 mm, and the linear displacement of the soft electro-fluid actuator can be converted into a 20° rotation angle through the gear steering mechanism, thus validating the effectiveness of the hydraulic electrostatic actuator.