Neutron-induced damage in SiC up to a fluence of 1.9×10 27 n/m 2 ( E>0.1 MeV) was examined by means of X-ray diffractometry and high-resolution electron microscopy. Specimens of β-SiC were irradiated in fast breeder reactors at 370 to 650°C. The lattice parameters of all specimens were increased by the irradiation, but above 2×10 26 n/m 2 lattice expansion decreased and was accompanied by significant peak broadening. Electron microscopy revealed a high density of interstitial loops on {111}, where X-ray diffraction peaks showed marked broadening. Peak broadening could be attributed mainly to the crystallite size effect at lower fluences, but a strain contribution was significant above 2×10 26 n/m 2. Electron diffraction patterns and high-resolution images indicated preservation of crystallinity up to the highest fluence observed. Thermal annealing up to 1000°C did not affect the peak broadening and average loop diameter. Above 1400°C, decrease in lattice strain and increase in crystallite size with increasing annealing temperature were observed.
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