We have designed and built the first fully functional vacuum microprobe test facility specifically intended to optimize the development of microelectromechanical systems (MEMS) devices for space applications. This facility includes an ion-pumped, ultraclean vacuum system outfitted with four three-axis precision microprobe stages. The testing is monitored with a long focal length microscope through a thin sapphire window. Testing of several initial MEMS designs shows extremely promising results for using such devices in space applications. In particular, we show that significantly reduced voltages are adequate to resonantly drive some MEMS devices in vacuum owing to significantly reduced damping and the consequent much higher Q of the systems (∼1000×) in the absence of air. We also show the results of a many cycle (>1010) test of a comb-driven, force–distance multiplied sliding aperture door and demonstrate that potential show-stopper issues such as stiction and vacuum welding can be overcome in MEMS devices properly designed for the vacuum environment.