2This study proposes a method for the investigation of the effects of uniaxial stresses, in a temperature-dependent manner, to MOSFET device characteristics, such as mobility, threshold voltage, and on-current. This simple scheme did not require complicated instruments and generated more homogeneous stresses for elucidating the effects of uniaxial mechanical strains on MOSFET devices. Experimental and Results The NMOS transistors were fabricated on industry standard 12 in. Si wafers with a 001 surface and wafer notch on the 110 axis. The direction of the current flow for transistors with 45 orientation is along the 100 axis. Transmission electron micrographs TEMs of 40 nm gate length n-MOSFET are shown in Fig. 1b. The devices were patterned with 193 nm lithography. The standard processes of STI, gate oxide, SiN spacer, source/drain S/D implant, spike anneal, Ni salicide, and Cu interconnect processes were applied. During gate oxide formation, nitride treatment was added. At the end of the process flow, a highly tensile silicon nitride layer was deposited, which covered the source, drain, and gate stack. This capping layer created tensile stresses in the channel area. The gate oxynitride thickness was 1.2 nm and gate polysilicon thickness was 98.5 nm. The sidewall spacer was O/N/O structure. The unstrained devices without a nitride layer were also fabricated. The transport properties of electrons in unstrained and strained Si were studied along the crystallographic 100 directions in the linear regime. The mechanical stress was applied in parallel or perpendicular direction to the MOSFET current flow. We chose this coordinate system versus one aligned to 100 axes. Followed are descriptions of the proposed method Fig. 1. Square strips were cut from the wafer using the saw procedure. They were abraded from a thickness of 800 to 50 m and then placed on stainless steel foil, then pasted on an aluminum pedestal with a curvature of radius 2, 3, 4, and 5 mm, using adhesive tapes. The adhesive tape is heatproof below 573 K. The surface stress was determined using the relationship, 1 = t/2R and 2 = E * , where E is Young’s Modulus E = 130 GPa for 100 silicon orientation, t is the total thickness of the flakes, and R is the radius of the aluminum pedestal. The transfer characteristics of the devices were measured using a semiconductor parameter analyzer HP 4156C. This work studied the device characteristics at temperatures ranging from 303 to 363 K by imposing external mechanical longitudinal or transverse stress on a Si pedestal. Figure 2 shows the n-MOSFET mobility variations for unstrained device and the devices under tensile stresses or , where the subscript and refer to the directions parallel and transverse to the current flow in the plane of the n-MOSFETs. In Fig. 2a, the mobility under all three cases decreases as the temperature increases. Since a carrier moving through the crystal is scattered by a vibration of the lattice, we should expect the mobility to decrease as the sample is heated. 5 However, the percentage drops in
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