A survey of analytic techniques for subsurface inspection by means of acoustic reflective microscopy is presented. The measurement of the acoustic material signature is carried out using a computer-assisted scanning acoustic microscope operating at frequencies between 100 and 400 MHz. Thickness measurements of surface layers and the detection of subsurface defects with descriptive parameters are pointed out. The examination of stress states in the surface comprises methods for measuring the change in the surface acoustic wave velocity with applied stress. Some typical results obtained for solid state materials are shown. Advantages and limitations of alternative measuring techniques are discussed.