Microgroove Depth Research Articles

Ultrasonic vibration-assisted electrical discharge machining of enclosed microgrooves with laminated electrodes

An enclosed microgroove is a vital surface microstructure that is difficult to prepare on the surfaces of difficult-to-machine electrically conductive materials using conventional methods. Electrical discharge machining (EDM) is suitable for this task. It is obtained primarily through layer-by-layer scanning EDM with micro-column electrodes or reciprocating EDM with foil electrodes. However, owing to the small cross-sectional size of the electrodes, a stable machining process is challenging to achieve, which seriously reduces the machining efficiency. To solve these problems, this study proposed ultrasonic vibration-assisted EDM using a laminated electrode possessed strong anti-interference properties for enclosed microgrooves. The effects of ultrasonic vibration on the EDM of microgrooves with single foil and laminated electrodes were investigated. The results show that ultrasonic vibration could improve the machining efficiency of the two types of electrodes and significantly improve the profile quality of the microgrooves prepared using laminated electrodes. When the amplitude was 3 μm and the frequency was 30 kHz, the bottom sidewall corner radius of microgrooves machined by brass foils in laminated electrodes was 28 μm, the width, depth, and roughness of microgrooves machined by copper foils in laminated electrodes were approximately 78 μm, 229 μm and 0.7 μm, the material removal rate was 0.0072 mm3/min. Based on the optimized parameters, inverted “convex” microgrooves with fine consistency were successfully prepared using laminated electrodes on Ti–6Al–4V alloy surfaces. The machining time was reduced by 40% for each microgroove compared with using the single foil electrode. This study provides a new method for preparing complex microgrooves.

A novel micro-rolling & incremental sheet forming hybrid process: Deformation behavior and microstructure evolution

Thin-walled metal parts with functional micro-featured surface have broad application prospects in the fields of resistance reduction, noise reduction, etc. In this study, a novel micro-rolling & incremental sheet forming hybrid process (μR-ISF) is proposed to fabricate thin-walled metal parts with microgroove arrays. An analytical model which relates the rolling force and microgroove depth in the micro-rolling stage was first established. Then, the formation mechanism of microgroove morphology during both micro-rolling stage and macro-shape forming stage are investigated. After the micro-grooved sheet being incrementally formed, a significant reduction (between 21% to nearly 60%) is occurred in the depth of both transverse and longitudinal grooves compared to the flat sheet. Meanwhile, the width of transverse grooves decreases slightly by about 10% on average, while the width of longitudinal microgrooves increases significantly by more than 30% on average. After micro-rolling, 85°{101¯2} tensile twins appear on the micro-grooved sheet and the percentage of 65°{112¯2} compressive twins increases. After incremental forming, the percentage of low-angle grain boundaries and the density of geometrically necessary dislocations in the formed part increase significantly, and the grain size distribution becomes more uniform. The present work provides a new strategy for the fabrication of 3D metal thin-walled components with surface micro-features.

Microstructure evolution and ablation mechanism of SiCf/SiC ceramic matrix composite microgrooves processed by pico-second laser

SiCf/SiC ceramic matrix composites have been widely applied in turbine engine aerospace components with high temperature resistance, high strength, and lightweight performances. Due to the high brittleness and anisotropy, laser-assisted machining acts as a feasible process to improve the machinability of the SiCf/SiC composites. A single-factor experiment was designed to understand the microstructure evolution and ablation behaviors of the microgrooves processed by pico-second laser in this study. The high pulse energy/scanning time and low scanning speed had positive impacts on the depth and width, but negative effect on the three-dimensional surface roughness Sa. Besides, the optimal parameter was 200 kHz repetition frequency. In addition, the microstructure evolution and ablation mechanism under different laser parameters were investigated by the HRSEM, EDS, and XRD analysis. These experimental results showed that the machined microgrooves were covered by a large amount flocculent composed of amorphous SiO2 when the oxidation was weak, and the splashes with the form of amorphous SiO2 and crystal SiO2 under strong ablation conditions. This indicated that the plasma effect transformed to the photothermal effect with enough heat. Meanwhile, a condensate layer occurred in all experiments and a recrystallized SiC layer relied on the microgroove depth controlled by adjusting laser parameters. This work will provide a theoretical basis and practice guidance for laser-assisted machining of the SiCf/SiC composites.

Surface microstructure evolution of Cf/SiC ceramic matrix composite microgrooves processed by ultrafast laser

Modern aviation components have higher requirements for high temperature resistance, high strength and lightweight materials, and ceramic matrix composites have superior overall performance. However, its high brittleness and anisotropy lead to a challenge for manufacturing. In order to understand the formation conditions and the evolution of surface microstructures of the Cf/SiC microgrooves processed by ultrafast laser comprehensively, we designed a single-factor experiment and performed sensitivity analysis. The experiment results showed that the pulse energy had great effects on the depth of the microgroove, and the intense ablation caused more active oxidation of SiC to occur, generating more SiO(g). However, too much pulse energy may cause the material removal mechanism to be more due to the photothermal effect rather than the plasma effect. Low repetition frequency caused a large number of laminated connections in the microgroove and the oxide gradually changed from lumpy to flocculent as the repetition frequency increased. The more scanning times, the more ablation products sputtered onto the sample surface, including unablated carbon fibers. Shallow depth and ablation residues remained in the microgroove occurred under few scanning times. Although too fast scanning speed leaded to a rapid decrease in the microgroove depth, too slow scanning speed also generated more unablated carbon fibers sputtering out of the microgrooves. The microgroove depth had the highest sensitivity to the repetition frequency, followed by the pulse energy and scanning speed. The pulse energy and scanning speed had a greater effect on the oxide layer height, the repetition frequency affected the oxide layer width, and the scanning speed affected the microgroove width significantly. According to the processing requirements and the hot spot map, the processing parameters that can be adjusted effectively will be able to be obtained.

An investigation on the adhesion of dual-scale micro-nano composite structure on the surface of aluminum

Adhesion is a crucial characteristic of hydrophobic surfaces that significantly impacts their practical applications. This paper proposes an innovative method for preparing a dual-scale micro-nano composite structure surface by combining mechanical ruling and anodic oxidation, which demonstrates great potential in enhancing hydrophobic surface properties. Through the analysis of the influence of micro-groove depth on the adhesion of hydrophobic surfaces, it has been discovered that micro-groove dimensions can be used to control surface adhesion while maintaining hydrophobicity, without complex chemical modifications. These findings present a promising approach for tailoring the properties of hydrophobic surfaces to suit specific applications. Compared with the single-scale micro-groove array structures, the surface roughness of the dual-scale micro-nano composite structures is significantly increased, and the contact angle of the water droplet is significantly increased. At the same time, the hydrophobicity and adhesion of the surface of the dual-scale micro-nano composite structures were analyzed. The results show that after anodizing, the contact angle of the dual-scale micro-nano composite structure surface increases, and the surface adhesion can be controlled by adjusting the structural parameters of the micro-groove and the anodizing process parameters, to ensure that the surface presents hydrophobic property while realizing the controllable adhesion of the hydrophobic surface. In this paper, dual-scale micro-nano composite structures fabricated by the composite method have achieved hydrophobic properties, and the surface adhesion can be effectively controlled by adjusting the processing parameters. This method has certain reference significance for the preparation of the controllable adhesive hydrophobic surface and lays a foundation for the further study of the controllable adhesive hydrophobic surface.

Achieving excellent interfacial bonding of QP980 steel to CFRTP by laser joining via carbon fiber reinforced mechanical anchorage

Carbon fiber reinforced thermoplastic composites (CFRTP)-metal hybrid structures can significantly reduce weight and cost while maintaining good performance. In this paper, a diode laser was used to join QP980 steel-CFRTP at a lap joint configuration. Furthermore, an ultrafast laser ablation process was used to produce periodic micro-groove structures on the surface of QP980 in order to generate mechanical anchors and improve QP980-CFRTP interfacial bonding performance. The relationship between the shear strength of QP980-CFRTP joints and laser heat input as well as QP980 surface micro-groove depth were evaluated. It was found that both heat input and micro-groove depth significantly affected the state of resin near the bonding interface. The suitable heat input and the micro-groove depth produced the optimized mechanical anchorage structures without the formation of the pores and porosities. Furthermore, a new method was proposed to significantly improve the joint performance where the orientation of fiber and the micro-grooves were intentionally designated as the same and perpendicular to loading direction in order to form carbon fiber reinforced interfacial mechanical anchorage structures. By optimized heat input, micro-groove depth and orientation, the peak load of the joint was dramatically improved by 515% compared with that without laser ablation treatment.

Influence of the mass conservation cavitation boundary on the tribo-dynamic responses of the micro-groove water-lubricated bearing

This study aims to reveal the role of the mass conversation cavitation boundary on the tribo-dynamic responses of five kinds of micro-groove water-lubricated bearing under mixed lubrication. By introducing the mass conservation boundary, the tribo-dynamic model of the water-lubricated micro-groove bearing is established and numerically solved by the control volume method. The accuracy of the developed model is verified by comparing the calculated results with the existing experimental and simulation results. The effects of cavitation under Reynolds and mass conservation boundary conditions on different micro-groove bearings were analyzed using the model, and the rotational speed and microgroove depth parameters were analyzed. The simulation results show that , regardless of the shape of the bottom of the microgroove, cavitation can stabilize the journal movement and enhance the dynamic pressure effect of the micro-grooves. The parameter analysis of rotational speed and micro-groove depth proves that rotational speed significantly influences the micro-groove cavitation zone and the dynamic pressure effect. Moreover, the greater the micro-groove depth, the smaller the enhancement effect of cavitation to dynamic pressure. The water-lubricated micro-groove bearing with the bottom shape of the left-triangle has the best lubricating performance during the whole analysis process.

Scaling of Anisotropic Wetting Behavior of Water Drop Configuration Arising from Parallel Groove-Textured Stainless Steel Surfaces

Understanding the wetting behavior of stainless steel surfaces can help in resolving many socio-economic challenges faced by modern day engineering developments. In this research paper, investigations have been carried out to understand the role of surface unidirectional microgrooves on the wetting behavior by the water drop liquid using the liquid drop shape configuration, captured in the view direction parallel and orthogonal to surface microgrooves. Because of the variation in wetting characteristics between these two directions, i.e., anisotropic wetting behavior, the liquid drop has attained ellipsoidal shape configuration in the microgroove-textured stainless steel surfaces. Detailed investigation has been carried out in understanding the role of microgroove geometrical sizes, i.e., width and depth and the spacing between the grooves on the wetting behavior in terms of contact diameter (D) and contact angle (θ). Overall, the wetting dynamics has been characterized by looking at the variation of eccentricity (ε, as a ratio between D in the direction parallel to microgroove and the spreading diameter in the direction orthogonal to microgroove) and wetting anisotropy (Δθ, as a difference in θ between the direction orthogonal and parallel to microgroove) with the microgroove depth parameter (ϕ as a ratio between the microgroove depth and width) and the groove spacing parameter (ξ as a ratio of the spacing between the grooves and the groove width). By and large, with increase in surface non-dimensional geometrical parameters, ϕ and ξ, the parameters quantifying eccentricity, ε and Δθ decrease, so the liquid drop shape configuration shifts towards spherical cap from ellipsoidal cap.

Modeling and optimizing femtosecond laser process parameters for high-efficient and near damage-free micromachining of single-crystal GaN substrate

This paper presents a high-efficient and near damage-free micromachining method for gallium nitride (GaN) using femtosecond laser direct writing. To provide a precise selection principle of process parameters, the influences and interactions on GaN processing of parameters are systematically studied. Variance analysis results of single factor experiments show that laser power, scan speed, scan times and repetition frequency mainly influence the microgroove depth, microgroove width, heat-affected zone (HAZ) and material removal rate (MRR). In addition, the response surface method (RSM) indicates the interaction between scan times and repetition frequency has an appreciable influence on HAZ. And the interaction between scan speed and laser power plays a key role in MRR. Quadratic polynomial prediction models have been established by RSM and have discrepancies of less than 9.5% compared with the experimental results. The optimized parameters are important to achieve the desired control and high efficiency of femtosecond laser micromachining of single-crystal GaN substrate.

A new one-step approach for the fabrication of microgrooves on Inconel 718 surface with microporous structure and nanoparticles having ultrahigh adhesion and anisotropic wettability: Laser belt processing

Two typical aspects of wettability on functional surfaces, namely, ultrahigh adhesion and anisotropic wettability, have attracted considerable interest for practical applications. A new and efficient method, laser belt processing, was proposed in this study for the preparation of Inconel 718 surfaces with ultrahigh adhesion and anisotropic wettability. The microgroove depth processed by the laser belt could be increased without changing the processing parameters, and microporous structures with nanoparticles were introduced. The results showed that the width and depth of the microgrooves increased with increasing laser power and processing times, whereas the depth decreased when the processing times was increased by eight times owing to the removal effect of belt grinding. The surface wetting state was between the Wenzel and Cassie wetting states, and van der Waals forces on the surface provided ultrahigh adhesion. The anisotropic wettability increased with increasing laser power, with a maximum contact angle of 121.3° and anisotropy of 34.9° at a laser power of 9.8 W. The microporous structure with nanoparticles enhanced the anisotropy. A new approach for the preparation of microgrooves was thus demonstrated. The prepared surface with ultrahigh adhesion and anisotropic wettability has promising applications in the field of droplet smart transport and microfluidic devices.

Effects of bubble behaviors in femtosecond laser machining of silicon wafer in liquids

In this article, the effects and mechanism of how bubble behaviors would affect liquid-assisted femtosecond laser cutting of silicon wafer are investigated. There are two kinds of bubbles generated during laser ablation in liquids, including the cavitation bubbles and the persistent bubbles. First, evolutions of the laser-induced cavitation bubbles are recorded by time-resolved shadowgraph imaging. The maximum height of the cavitation bubbles is shown to be 42 μm at the pulse energy of 18.15 μJ. The cavitation bubbles are shown to cause the defocusing effect on subsequent pulses, resulting in non-uniform ablated microgrooves. To improve the microgrooves morphology, the time interval between adjacent pulses is adjusted on basis of lifetime of the cavitation bubbles. The defocusing effect becomes alleviative when the time interval exceeds 100 μs. Next, the persistent bubbles are induced after the collapse of the cavitation bubbles and whose behaviors are studied. The results show that drastic explosions occur once the laser interacts with the persistent bubbles covered on the microgroove, and cause detrimental effects on surface morphology. The ethanol solution is chosen to improve surface wettability on basis of the dwell property of the persistent bubbles. Finally, the shielding effect of the persistent bubbles for incoming laser pulses is studied, which shows a decrease in the microgroove depth by 53 % in the 2 wt% ethanol solution. This work illustrates how the bubbles affect the cutting of silicon wafer under liquid, and how uniform microgrooves with fine surface morphology are achieved by utilizing the bubble behaviors.

Process Research on the Microgroove Depth Uniformity of Bursting Discs Using Femtosecond Lasers

This study proposes an ultrafast laser ablation method for improving the depth uniformity of microgrooves in bursting discs. Under a lower laser fluence, the influence of the spot overlap rate on the depth uniformity of microgrooves was studied. The results show that 80% of the spot overlap ratio has good performance in ablation efficiency and depth uniformity of microgrooves. On this basis, the relationship between the number of laser scanning layers and the depth of microgrooves was studied, and the number of scanning layers needed to ablate 70 µm microgrooves was obtained. Based on the combination of the process parameters and the optimization of the laser scanning path, laser ablation of bursting disc microgrooves with a specific shape was realized. The depth uniformity of microgrooves in different sections of the bursting disc was not worse than 4 µm. The preliminary bursting test shows that the bursting pressure between the discs was no more than 0.06 Mpa. Compared with the results of the traditional processing method, the microgroove depth uniformity of bursting discs was greatly improved. Therefore, femtosecond laser ablation technology provides an advanced manufacturing method for bursting disc microgroove machining.

Friction regulation of laser textured PVA hydrogels against a titanium alloy

Hydrogels have exhibited extremely complex tribological behaviors. Although various physical mechanisms have been proposed to explain their tribological behaviors, it is still a challenge to develop convenient and efficient regulation methods for tribological behaviors. We propose micro-grooves with different depths and spacings prepared on the PVA hydrogels surface by ultraviolet laser texturing to provide an effective method for understanding the tribology of hydrogels. At the sliding velocity range of 0.085 mm/s < v less than 2.3 mm/s, the effect of interlocking and ploughing force between the direct contact interfaces are the dominant origins of friction. Frictional stress increases when the spacing of the micro-groove getting smaller as the frequency of interlocking getting higher. Interestingly, frictional stress doesn’t increase with increasing micro-groove depth. Once the velocity exceeds to 6.9 mm/s, all the micro-grooves begin to wear and fracture, and the results of the frictional test become inaccurate. Smooth hydrogels without any micro-grooves enter elasto–hydrodynamic transition at the lowest velocity, which have minimum friction stress. These results take us a step closer to deriving a more effective, accurate, and dependable guideline for sliding friction control in hydrogel applications.

High-quality micro-shape fabrication of monocrystalline diamond by nanosecond pulsed laser and acid cleaning

The flat plane of small surface roughness below 0.1 µm average roughness was obtained for monocrystalline diamond by nanosecond pulsed laser irradiation of 1060 nm and post-process acid cleaning, at a laser fluence around the material removal threshold value. The glossy and flat plane at the bottom of the micro-groove was parallel to the top surface of the specimen, although the round beam of Gaussian mode was irradiated in the direction perpendicular to the top surface of specimen. The square beam of top-hat mode produced a shallower micro-groove with a wider, flatter bottom compared with the round beam in Gaussian mode. The creation method of the flat plane with small surface roughness was discussed in the arrangement strategy of linear micro-grooving by the square beam of top-hat mode. Normal side-by-side repetition of linear micro-grooving did not create a flat plane with constant depth. Therefore, a two-step scanning method was proposed in order to overcome the problem in the normal side-by-side repetition of liner micro-grooving. Non-removal areas were partly retained between the processing lines in the first step, and the laser scanning was conducted on the retained area in the second step. The newly proposed two-step scanning method was practical and useful to create a widely flat plane with small surface roughness, and the two-step scanning method provided superior control over the micro-groove depth. This proposed method can reduce the surface roughness in addition to the shape creation of monocrystalline diamond, and it can be used as a high-quality micro-shape fabrication method of monocrystalline diamond.

Study on time-varying mixed lubrication performance of microgroove journal-thrust coupled bearing under water lubrication

PurposeThe purpose of this study is to numerically investigate the time-varying mixed lubrication performance of microgroove journal-thrust coupled bearing (MJTCB) under nonlinear excitation.Design/methodology/approachA three degree of freedom (3-DOF) dynamic model of the rotor coupling with the transient mixed lubrication behavior is established. Based on numerical predictions, the role of the microgroove on the time-varying mixed lubrication performance of MJTCB is identified. The effects of the microgroove depth, microgroove shape and external load on the time-varying mixed lubrication performance of MJTCB are also studied.FindingsNumerical results show that the effect of the coupling hydrodynamic on the time-varying mixed lubrication performance of the coupled bearing is strengthen with the increasing of microgroove depth. Furthermore, it is found that the optimal microgroove shape for the thrust bearing, arc or rectangle, highly depends on the microgroove depth. Finally, the contact performance of the thrust bearing is slightly affected by the radial external load.Originality/valueThis study is expected to achieve a better understanding of the time-varying mixed lubrication performance of MJTCB under nonlinear excitations.

Effect of surface micro-groove texture on lubrication performance of tripod universal coupling

Purpose This study aims to study the effect of micro-groove texture geometric parameters on the lubrication characteristics of the tripod universal coupling. Design/methodology/approach The Navier–Stokes equation was used to analyse the influence of micro-groove geometric parameters on the coupling’s lubrication performance. Further, Kriging approximate model and neighborhood cultivation genetic algorithm (NCGA) were used to optimise the micro-groove geometric parameters and improve the coupling’s lubrication performance. Findings The results show that as the micro-groove depth and width increase, respectively, the oil film-bearing capacity first increases and then decreases; on the contrary, the friction coefficient first decreases and then increases. With the increase of the micro-groove inclination angle, the bearing capacity of the oil film first increases and then remains unchanged. At the same time, the friction coefficient first decreases and then increases slightly. The lubricating performance of the optimised coupling is significantly improved: the optimised oil film-bearing capacity increases by 12.5%, the friction coefficient reduces by 14% and the maximum oil film pressure increases by 4.3%. Originality/value At present, the grease lubrication performance of the micro-groove textured tripod universal coupling has not been studied. The micro-groove parameters are optimised, and the coupling’s lubrication performance is improved greatly by the Kriging model and NCGA algorithm. It is of great significance to extend the coupling’s fatigue life.

Comparison of nanofluid wetting characteristics in untreated and superhydrophilic microgrooved heat pipes

The thermal performance of the microgrooved heat pipes is mainly restricted by the wick capillary limit. The construction of micro-nano structures and using nanofluids are effective ways to improve the microgroove wetting characteristic and heat transfer ability. Based on the accommodation theory, a model for nanofluid wetting characteristics in the microgrooved heat pipe was presented in this paper. The axial wetting ability of SiO2 nanofluid in untreated rectangular microgrooves (RMs) and rectangular microgrooves with superhydrophilic nano-textured surfaces (RMSNSs) were compared. The results indicate that the total wetting length (Lt) of SiO2 nanofluids in RMSNSs was remarkably longer than that in RMs. For RMs, the wetting length in the corner flow region (Lc) could nearly be ignored. However, Lc of RMSNSs increased significantly being about 35% of Lt. When the nanoparticle size rose from 15 to 50 nm, Lt of RMSNSs increased by about 13% but that of RMs decreased slightly. When the heat flux increased from 0 to 120 kW/m2, Lt of RMSNSs and RMs dropped by about 72.6% and 69.5% respectively due to the liquid evaporation. Also, the microgroove depth and width had remarkable effects on the wetting length and the optimal depth to width ratio was about 2:1.

Influence of the profile of longitudinal grooves of various depths on increasing static characteristics of radial gas bearings

Radial gas bearings with one line for supplying compressed gas to the working gap with blind microgrooves of constant width and variable depth of the different profiles are considered. Such as with constant depth microgrooves; triangular or stepwise with decreasing depth of grooves along the course of compressed gas. For them, the radial lifting force, the recovery moment for angular displacements of shaft in the range of constancy of radial and angular stiffness and consumption of compressed gas for the bearing’s work are found. Calculations and studies have shown that a radial bearing with longitudinal microgrooves whose depth decreases linearly in the direction of gas flow has a large radial lifting force and a recovery moment for angular displacements of shaft compared to a bearing with microgrooves of constant depth. Bearings with stepped longitudinal microgrooves with greater depth at the entrance to working gap are operable in the range of practical use of bearings and have greater dimensionless radial and angular stiffness and are more economical compared to bearings with microgrooves of constant depth. In practical activities (when designing spindle units), it is not recommended to use gas bearings with a variable depth of microgrooves having a minimum depth at the entrance to working gap. With optimal design parameters, the flow rate of compressed gas for bearings with longitudinal microgrooves of different transverse profiles with alignment of shaft and sleeve is almost the same (the difference is about 7, 8%).

A hydrodynamic lubrication model and comparative analysis for coupled microgroove journal-thrust bearings lubricated with water

The novelty of this study is to develop a hydrodynamic lubrication numerical model for coupled microgroove journal-thrust bearings (or coupled bearings) under water-lubricated condition. In the present model, the continuity of the hydrodynamic pressure and the fluid field (or coupled hydrodynamic effect) at common boundary is considered to reveal the mutual effect between the hydrodynamic behavior of the journal bearing and the thrust bearing. The lubrication performances of the coupled microgroove bearing with three bottom shapes, i.e., isosceles triangle, right triangle, and left triangle, are studied comparatively. Additionally, the effects of the microgroove depth on the lubrication performances of the coupled bearing are discussed. The present study reveals that the coupled hydrodynamic effect generated by the coupled bearing can improve the lubrication performance for both the journal and the thrust bearing. The microgroove with left triangle bottom shape yields the optimal lubrication performance as compared to the other two. There is an optimal groove depth that generates the maximum load capacity and the minimum friction coefficient for both the journal and the thrust bearing.

Experimental Investigation on Micro-Groove Manufacturing of Ti-6Al-4V Alloy by Using Ultrasonic Elliptical Vibration Assisted Cutting.

The micro-groove structure on the planar surface has been widely used in the tribology field for improving the lubrication performance, thereby reducing the friction coefficient and wear. However, in the conventional cutting (CC) process, the high-quality, high-precision machining of the micro-groove on titanium alloy has always been a challenge, because considerable problems including poor surface integrity and a high level of the material swelling and springback remain unresolved. In this study, the ultrasonic elliptical vibration assisted cutting (UEVC) technology was employed, which aimed to minimize the level of the material swelling and springback and improve the machining quality. A series of comparative investigations on the surface defect, surface roughness, and material swelling and springback under the CC and UEVC processes were performed. The experimental results certified that the material swelling and springback significantly reduced and the surface integrity obviously improved in the UEVC process in comparison to that in the CC process. Furthermore, for all the predetermined depths of the cut, when the TSR (the ratio of the nominal cutting speed to the peak horizontal vibration speed) was equal to one of twenty four or one of forty eight, the accuracy of the machined micro-groove depth, width and the profile radius reached satisfactorily to 98%, and the roughness values were approximately 0.1 μm. The experimental results demonstrate that the UEVC technology is a feasible method for the high-quality and high-precision processing of the micro-groove on Ti-6Al-4V alloy.