We demonstrate the possibility of diffusion formation of the chemically ordered L1 0-MnPt phase through the vacuum annealing of Pt(24 nm)/Mn(20 nm) and Pt(12 nm)/Mn(20 nm)/Pt(12 nm) layered stacks at 400 °C for 30 min. For the bi-layered stack annealed at 400 °C, the effect of Pt atoms segregation at the film/substrate interface was detected, which remained after annealing even at higher temperatures (500 °C and 600 °C) and prevented the whole homogenization of the chemical composition through the film depth. By contrast, for the tri-layered stack annealed at 400 °C, the presence of the additional Pt bottom layer enabled to change the rate and mechanism of reactive diffusion, leading to homogeneous distribution of components and enhanced crystallinity of the ordered L1 0-MnPt phase compared to the bi-layered sample. An explanation of the obtained experimental data is provided based on the fundamentals of mass transfer theory and its quantitative parameters (e.g. activation energy and diffusion coefficients).