Deposition Rate Research Articles

A Microporous Channel Copper Immersion Layer Promotes the Rapid Ni-P Electroless Plating Process on Aluminum Alloys at Medium and Low Temperatures

Abstract Electroless plating is a commonly used method to enhance the corrosion resistance, wear resistance, and decorative performance of aluminum alloys. However, in electroless plating processes, it is customary to maintain the solution temperature at levels exceeding 85°C, a critical condition that ensures a sufficiently rapid deposition rate and thereby fosters the formation of high-performance coatings. Conventional immersion pretreatments with zinc and palladium result in lower deposition rates at low temperatures. This study shows that a copper immersion layer with microporous channels can facilitate the electroless plating process for aluminum alloys at lower temperatures. Through a redox reaction in a Cu2+-containing solution at 70°C, a copper immersion layer with a microporous structure could be created on an aluminum alloy. The microporous channels between the copper immersion layer and the aluminum alloy create electrochemical corrosion cells in the plating solution, accelerating the electroless plating process. The Ni-P coating obtained after pretreatment by copper immersion has a higher hardness (578 HV) and a lower corrosion current density (0.55 μA/cm2). This work provides a practical method to rapidly fabricate high-performance Ni-P coatings at intermediate temperatures (70-75°C).

Acoustic Signal-Based Defect Identification for Directed Energy Deposition-Arc Using Wavelet Time–Frequency Diagrams

Several advantages of directed energy deposition-arc (DED-arc) have garnered considerable research attention including high deposition rates and low costs. However, defects such as discontinuity and pores may occur during the manufacturing process. Defect identification is the key to monitoring and quality assessments of the additive manufacturing process. This study proposes a novel acoustic signal-based defect identification method for DED-arc via wavelet time–frequency diagrams. With the continuous wavelet transform, one-dimensional (1D) acoustic signals acquired in situ during manufacturing are converted into two-dimensional (2D) time–frequency diagrams to train, validate, and test the convolutional neural network (CNN) models. In this study, several CNN models were examined and compared, including AlexNet, ResNet-18, VGG-16, and MobileNetV3. The accuracy of the models was 96.35%, 97.92%, 97.01%, and 98.31%, respectively. The findings demonstrate that the energy distribution of normal and abnormal acoustic signals has significant differences in both the time and frequency domains. The proposed method is verified to identify defects effectively in the manufacturing process and advance the identification time.

The Influence of Bias Voltage on the Structure and Properties of TiZrNbMo Coating Deposited by Magnetron Sputtering

TiZrNbMo coatings have been deposited using the direct current pulsed magnetron sputtering method in an argon atmosphere. The synthesis processes have been conducted under various process parameters. The structure (chemical and phase composition) and mechanical properties of the obtained multicomponent coatings are investigated as a function of plasma modulation frequency (10 Hz and 1000 Hz) and substrate bias (0 to −150 V). It is the case that an increase in the substrate bias decreases the deposition rate and alters the coating’s chemical composition. The latter leads to a Ti concentration decrease and a simultaneous increase in Mo and Nb concentrations in the final coating material. X-ray diffraction measurements indicate a single-phase BCC structure, with grain size decreasing as substrate bias increases. This ultimately forms an amorphous–nanocrystalline structure at −150 V. The mechanical properties of the multicomponent TiZrNbMo coatings have been determined using the nanoindentation method. The maximum values of hardness (13.45 GPa) and elastic modulus (188.6 GPa) are achieved at a substrate bias of −150 V. We also show that the minimum elastic modulus (41.8 GPa) is achieved at an intermediate substrate bias of −100 V.

Thermophoresis-Induced Polymer-Driven Destabilization of Gold Nanoparticles for Optically Directed Assembly at Interfaces.

The limitations of conventional template-based methods for the deposition of nanoparticle assemblies into defined patterns on solid substrates call for the development of techniques that do not require templates or lithographic masks. The use of optically-induced thermal gradients to drive the migration of colloids toward or away from a laser spot, known as opto-thermophoresis, has shown promise for the low-power trapping and optical manipulation of a variety of colloidal species. However, the printing of colloids using this technique has so far not been established. Herein, a method for the optically directed printing of noble metal nanoparticles, specifically gold nanospheres is reported. The thermophoresis of the polymer polyvinylpyrrolidone and gold nanospheres toward a laser spot led to the deposition of nanoparticle aggregates, capable of serving as surface-enhanced Raman scattering substrates. The influence of heating laser power and the concentrations of polymer, salt, and surfactant on the nanoparticle deposition rate and structure of the printed pattern are studied, showing that a variety of conditions can permit printing, suggesting facile generalization to different nanoparticle compositions, sizes, and shapes. These findings will greatly benefit future efforts for directed nanoparticle assembly, and drive applications in sensing, photothermal heating, and relevant applications in biomedicine and devices.

Effects of High Dietary Starch Levels on the Growth Performance, Liver Function, and Metabolome of Largemouth Bass (Micropterus salmoides)

In this study, we conducted a 16-week feeding trial to investigate the effects of a high-cassava starch diet on growth performance, liver function, and metabolism in largemouth bass (Micropterus salmoides). We formulated five diets containing varying levels of cassava starch: 12%, 9%, 6%, 3%, and 0% (termed M12, M9, M6, M3, and M0, respectively). We distributed these diets among largemouth bass with the initial body weight of 83.33 ± 0.55 g via an in-pond “raceway” aquaculture system. Our findings suggest that high level (12%) of cassava starch dietary inclusion adversely affected growth performance metrics such as weight gain rate and specific growth rate, along with feed utilization efficiency indicators, including protein efficiency, protein deposition rate, and the apparent digestibility of dry matter and protein. This negative impact was accompanied by a decrease in intestinal amylase activity. Through further transcriptomic analysis, we identified several key genes associated with carbohydrate metabolism, which underwent changes influencing liver function. Kyoto Encyclopedia of Genes and Genomes (KEGG) pathway analysis revealed the involvement of these differentially expressed genes (DEGs) in the tricarboxylic acid cycle (TCA cycle). Comparative metabolomics analysis further indicated that the M9 group showed significant enrichment in pathways related to amino acid metabolism and alterations in the levels of metabolites involved in carbohydrate metabolism. In conclusion, our study demonstrates that incorporating up to 9% cassava starch in the diet can enhance growth performance in largemouth bass by stimulating digestive enzyme activities and promoting glucose utilization.

The growth rate of senile plaques is determined by the competition between the rate of deposition of free Aβ aggregates into plaques and the autocatalytic production of free Aβ aggregates

The formation of amyloid beta (Aβ) deposits (senile plaques) is one of the hallmarks of Alzheimer’s disease (AD). This study investigates what processes are primarily responsible for their formation. A model is developed to simulate the diffusion of amyloid beta (Aβ) monomers, the production of free Aβ aggregates through nucleation and autocatalytic processes, and the deposition of these aggregates into senile plaques. The model suggests that efficient degradation of Aβ monomers alone may suffice to prevent the growth of senile plaques, even without degrading Aβ aggregates and existing plaques. This is because the degradation of Aβ monomers interrupts the supply of reactants needed for plaque formation. The impact of Aβ monomer diffusivity is demonstrated to be small, enabling the application of the lumped capacitance approximation and the derivation of approximate analytical solutions for limiting cases with both small and large rates of Aβ aggregate deposition into plaques. It is found that the rate of plaque growth is governed by two competing processes. One is the deposition rate of free Aβ aggregates into senile plaques. If this rate is small, the plaque grows slowly. However, if the rate of deposition of Aβ aggregates into senile plaques is very large, the free Aβ aggregates are removed from the intracellular fluid by deposition into the plaques, leaving insufficient free Aβ aggregates to catalyze the production of new aggregates. This suggests that under certain conditions, Aβ plaques may offer neuroprotection and impede their own growth. Additionally, it indicates that there exists an optimal rate of deposition of free Aβ aggregates into the plaques, at which the plaques attain their maximum size.

Edaphic factors mediate the responses of forest soil respiration and its components to nitrogen deposition along an urban-rural gradient

Exploring the influences of nitrogen deposition on soil carbon (C) flux is necessary for predicting C cycling processes; however, few studies have investigated the effects of nitrogen deposition on soil respiration (Rs), autotrophic respiration (Ra) and heterotrophic respiration (Rh) across urban-rural forests. In this study, a 4-year simulated nitrogen deposition experiment was conducted by treating the experimental plots with 0, 50, or 100 kg·ha−1·year−1 of nitrogen to check out the mechanisms of nitrogen deposition on Rs, Ra, and Rh in urban-rural forests. Our finding indicated a positive association between soil temperature and Rs. Soil temperature sensitivity was significantly suppressed in the experimental plots treated with 100 kg·ha−1·year−1 of nitrogen only in terms of the urban forest Rs and Ra and the rural forest Ra. Nitrogen treatment did not significantly increase Rs and had different influencing mechanisms. In urban forests, nitrogen addition contributed to Rh by increasing soil microbial biomass nitrogen and inhibited Ra by increasing soil ammonium‑nitrogen concentration. In suburban forests, the lack of response of Rh under nitrogen addition was due to the combined effects of soil ammonium‑nitrogen and microbial biomass nitrogen; the indirect effects from nitrate‑nitrogen also contributed to a divergent effect on Ra. In rural forests, the soil pH, dissolved organic C, fine root biomass, and microbial biomass C concentration were the main factors mediating Rs and its components. In summary, the current rate of nitrogen deposition is unlikely to result in significant increases in soil C release in urban-rural forests, high nitrogen deposition is beneficial for reducing the temperature sensitivity of Rs in urban forests. The findings grant a groundwork for predicting responses of forest soil C cycling to global change in the context of urban expansion.

Quartz grain microtextures of Holocene sebkhas sediments in southeast Tunisia: Implications for sedimentary processes and depositional environments

Detrital quartz grains extracted from sebkha sediments in southeastern Tunisia underwent scanning electron microscopy analysis to identify sediment sources and assess the influence of the saline environment on the grains. Core sediments collected from Sebkha el Melah and Sebkha Mhabeul cover the last 5000 and 2000 BP, respectively. The uppermost Unit III, present in both cores, exhibits two distinct facies based on the mechanical microtextures of its quartz grains. The aeolian facies sediments are characterized by quartz grains with rounded outlines, upturned plates, and crescentic percussion marks. In contrast, the fluvial facies sediments are associated with quartz grains featuring subangular outlines, v-shaped percussion cracks, conchoidal fractures. Observations on the quartz grains of the sebkhas suggest multiple transportation and processing events, indicating long-distance transport and rapid deposition rates. The majority of quartz grains appear to originate from the surrounding terrain, reflecting the dynamic geological history of the region. This study delves into the connection between microtexture variations on quartz grain surfaces and specific historical climatic conditions in the sebkhas. By examining geochemical variations along the cores, facies with elevated salt concentrations corresponding to warmer periods reveal extensively weathered quartz grains. This substantial chemical alteration is evident through microtextures such as oriented etch pits, anastomosed dissolution networks and solution crevasses. The profound dissolution has significantly impacted the quartz lattice, resulting in the decomposition of the grains and the formation of "cauliflower" or "spongy" shapes, erasing prior microtextures. Conversely, during less warm periods, quartz dissolution was less severe, thereby preserving microtextures.Sand grain surfaces are notably sensitive to both transport processes and variations in the physicochemical environment. In the hypersaline and confined environments of sebkhas in southeastern Tunisia, potent post-sedimentary processes can obliterate and obscure the original microtextures recorded on grains from previous environments due to highly fluctuating physicochemical conditions.

Oriented growth of 5-inch optical polycrystalline diamond films by suppressing dark features

Optical diamond materials are essential for infrared optical windows, microwave windows, and laser windows due to their exceptional properties. However, dark features inside the diamond are significant factors limiting optical properties, particularly at high deposition rates. This work focuses on adjusting crystallographic parameters to prepare (110) oriented optical-grade polycrystalline diamond films, aiming to mitigate dark features. Diamond films deposited via microwave plasma chemical vapor deposition (MPCVD) exhibit discernible quality stratification. Characterization analysis of diamond film samples with varying levels of black defects reveals a correlation: films with higher dark feature content tend to exhibit a preference for the (111) orientation, accompanied by a significant presence of penetration twins and interstitial voids. Conversely, transparent diamond films demonstrate a prominent (110) orientation, featuring numerous contact twins that alleviate competition from penetration twins and original grains during growth. Electron backscatter diffraction (EBSD) and scanning electron microscope (SEM) results reveal that transparent diamond films cultivated with a pronounced preference for the (110) orientation manifest consistent and seamless contact twins, leading to fewer dark features and improved optical transmittance. In contrast, (111) oriented diamond film exhibits numerous penetration twins, and holes form between them. Based on the analysis, 5-inch optical polycrystalline diamond films with (110) orientation were achieved successfully by suppressing dark features.

Nickel Salt Dependency as Catalyst in the Plating Bath on the Film Properties of Cu/Cu-Ni

Metal plating frequently employs nickel (Ni) and copper (Cu) as anodes. Cu/ Cu-Ni film formed has many advantages, such as better corrosion resistance and high hardness characteristics. This study aims to assess the properties of Cu/Cu-Ni film, such as phase, surface morphology, crystallographic orientation, hardness, corrosion analysis, and contact angle, which were fabricated using electrodeposition with various Ni salt additions (0.3, 0.5 and 0.7 M). In addition, the cathode current efficiency (CCE) and deposition rate of the Cu/Cu-Ni electrodeposition were also investigated. An increase in Ni salt in the plating bath could enhance the pH, promoting higher CCE and depleting hydrogen evolution at the cathode, leading to the presenting Ni phase in the alloy. The higher concentration of Ni salt in the solution could also enhance the deposition rate due to a shift to a pH value, which affects the roughening of the surface morphology, promoting a higher contact angle. All crystal structures generated by Cu/Cu-Ni electrodeposition were FCC, with the preferred orientation of the (111) plane. Crystallite size and lattice strain depend on the deposition rate. Less crystallite size and lattice strain affect the film’s hardness and corrosion resistance. Moreover, the third bath had the resulting Cu-Ni layer with the best hardness and corrosion rate of around 136 HV and 0.081 mmpy.

Experimental Studies on the Anisotropic Fatigue Behaviour of IN718 Fabricated via Wire Arc Additive Manufacturing

Wire and arc additive manufacturing (WAAM) offers promise in creating large complex structures due to its flexibility and high material deposition rates. The nickel-based alloy IN718 is favoured for WAAM due to its weldability and compatibility. However, WAAM can introduce issues like anisotropic grain structure, porosity, and residual stresses which can lead to directional variations in tensile, fatigue, and fracture behaviour. This paper studied the WAAM process of IN718, utilising cold metal transfer (CMT). The optimised CMT-WAAM parameters for IN718 were identified to as a wire feed speed of 8–10 m/min and a torch travel speed of 0.5–0.7 m/min, resulting in stable deposition and minimal defects. Nevertheless, columnar grain structures were observed in the build direction (BD), with coarse grains in the wall-length direction (WD). This anisotropic microstructure coupled with stress concentrators, contributes to the directional dependence observed in tensile properties, fatigue endurance, and crack growth. The investigation revealed superior ductility in the BD compared to the WD. Interestingly, the fatigue endurance testing showed a longer life in the WD compared with the BD, attributed to stronger stress concentrators in the BD specimens. However, when examining a cracked specimen, the fatigue crack propagated faster in the WD rather than the BD.

Microstructure and properties of TiB2/Cu composite coating with multi-layer structure prepared by electrodeposition

In order to improve the hardness of the copper surface, reduce its friction coefficient, and adjust the overall performance of the coating, a TiB2/Cu composite coating with multilayer structure was prepared by electrodeposition. The microstructure of the composite coating was analyzed by SEM and XRD. The microhardness and friction characteristics of the coating were tested, and the differences in the microstructures and properties of different coating structures were analyzed. Microstructure coatings with two layers (Cu + TiB2/Cu) and three layers (Cu + TiB2/Cu + Cu) were prepared on the copper substrate by electrodeposition. The TiB2 particles reduced the deposition rate of the TiB2/Cu composite coating by electrodeposition, by up to 29%. The TiB2 particles in the electrolyte increased the discharge voltage of the electrodeposition process. The content of TiB2 affected the microhardness, friction, and wear properties of the TiB2/Cu composite coating. The TiB2 particles increased the microhardness of the TiB2/Cu composite coating by 61%. The multilayer-structured coating prepared by electrodeposition could control the overall properties of the coating. The microhardness and friction coefficient of the TiB2/Cu + Cu coating were between those of the Cu and TiB2/Cu composite coatings.

A comprehensive kinetic study on low-GHG hydrogen production from microwave-driven methane pyrolysis

The present study focuses on the cogeneration of hydrogen (H2) and solid carbon from microwave-driven methane pyrolysis in a fluidized bed of carbon pellets. Numerical simulations using a coupled gas-solid chemistry approach reveal that introducing microwave thermal effects improves methane conversion rate, H2 selectivity, and carbon deposition rate. The chemical pathways analysis divulges that once the leading reaction for decomposing CH4 into H2, i.e., CH4+H ↔ CH3+H2, is completed, the C2H2 deposition mechanism onto the carbon pellets is the dominant pathway for the solid carbon production, indicating almost no carbon black (i.e., nanoparticles) formation. Carbon pellets provide abundant surface area for the conversion of C2H2 to H2, enhancing H2 selectivity in the resulting products. More importantly, the importance of more complex molecules, such as polycyclic aromatic hydrocarbons, greatly diminishes when using carbon pellets in the pyrolysis process, implying that smaller kinetic mechanisms are equally effective and desirable.

Fabrication of amorphous AlMo0.5NbTa0.5TiZr RHEA coatings and the impact of deposition temperature on microstructure and properties

In this study, protective AlMo0.5NbTa0.5TiZr refractory high-entropy alloy coatings were prepared by DC magnetron sputtering, and the influence of deposition temperature on the microstructure, deposition rate, mechanical properties, and adhesion force was investigated in detail. All coatings are in a nearly amorphous state. Their elastic recovery ratio (ηw), microhardness (H), elastic strain failure strength (H/E), plastic deformation strength (H3/E2), and adhesion force (Lc2) are positively correlated with deposition temperature mainly attributing to the synergy of increased thickness and the generation of the nanocrystal. The coating reaches its maximum ηw, H, H/E, H3/E2, and Lc2 of 43.87 ± 0.94 %, 12.74 ± 0.37 GPa, 0.073 ± 0.002, and 0.067 ± 0.005 GPa at the deposition temperature of 500 °C and exhibits superior wear resistance and resistance to plastic deformation, compared with reported refractory Cr and α-Ta coatings.

Deposition of Functionally Graded Material Fabricated by Robot Plasma Arc Welding

Functionally graded materials (FGMs) are a new type of composite materials capable of facilitating the dependable bonding of dissimilar materials. A double‐wire plasma welding process is used to manufacture Stainless steel 316 L (SS316L)/Inconel 625 FGM. Subsequently, two thin‐walled structures with 5% gradient and non‐gradient are fabricated to investigate the morphology, microstructure, and properties in different gradients, focusing on the 67% SS316L region. In the findings, it is indicated that two depositions exhibit well‐formed structures with varying gradients and no macroscopic defects. The composition experiences an abrupt transition at the interface between depositions with a non‐gradient, whereas deposition with a 5% gradient does not exhibit this issue and demonstrates a higher effective deposition rate. The analysis of the energy dispersive spectrum indicates the presence of Nb elements at the grain boundary in the 67% SS316L region, with no observed cracks. This suggests resistance to cracking and impediment to the segregation of Nb. Additionally, the hardness and tensile strength in various regions exhibit a gradual increase with a 5% gradient of Inconel 625 content, while the tensile anisotropy is not noticeable. Consequently, the 5% gradient transition demonstrates a more favorable performance in comparison to the non‐gradient sample, resulting in the avoidance of the 75% SS316L region due to its poor performance.

Indoor concentrations of radioactive aerosols from nuclear accidents.

In previous studies, some of the important factors that affect the spread of radioactive aerosols into indoors were considered. The studies were based on a new CFD approach and provided good descriptions for the deposition of aerosol particles inside small spaces and the penetration of aerosols into buildings through wall cracks. In this article, an application of those studies is implemented, where all the graphical relations that are required to estimate the indoor concentrations of radioactive aerosols from nuclear accidents are provided. This includes the deposition velocities, deposition rate, and the penetration factor. Particular interest is in the Fukushima-Daiichi nuclear power plant accident that took place in Japan in 2011. The aerosols carrying the radioiodine iodine-131 and the radiocesium cesium-134 and cesium-137 are studied. Based on the model's assumptions, and assuming steady-state air concentrations, the radioactive aerosols' concentrations in indoor air are about 97% of the concentrations in outdoor air. The applications demonstrate the model to be convenient and practical.

OrthoPhyl - Streamlining large scale, orthology-based phylogenomic studies of bacteria at broad evolutionary scales.

There are a staggering number of publicly available bacterial genome sequences (at writing, 2.0 million assemblies in NCBI's GenBank alone), and the deposition rate continues to increase. This wealth of data begs for phylogenetic analyses to place these sequences within an evolutionary context. A phylogenetic placement not only aids in taxonomic classification, but informs the evolution of novel phenotypes, targets of selection, and horizontal gene transfer. Building trees from multi-gene codon alignments is a laborious task that requires bioinformatic expertise, rigorous curation of orthologs, and heavy computation. Compounding the problem is the lack of tools that can streamline these processes for building trees from large scale genomic data. Here we present OrthoPhyl, which takes bacterial genome assemblies and reconstructs trees from whole genome codon alignments. The analysis pipeline can analyze an arbitrarily large number of input genomes (>1200 tested here) by identifying a diversity spanning subset of assemblies and using these genomes to build gene models to infer orthologs in the full dataset. To illustrate the versatility of OrthoPhyl, we show three use-cases: E. coli/Shigella, Brucella/Ochrobactrum, and the order Rickettsiales. We compare trees generated with OrthoPhyl to trees generated with kSNP3 and GToTree along with published trees using alternative methods. We show that OrthoPhyl trees are consistent with other methods while incorporating more data, allowing for greater numbers of input genomes, and more flexibility of analysis.

Wafer Scale Insulation of High Aspect Ratio Through-Silicon Vias by iCVD.

In microelectronics, one of the main 3D integration strategies consists of vertically stacking and electrically connecting various functional chips using through-silicon vias (TSVs). For the fabrication of the TSVs, one of the challenges is to conformally deposit a low dielectric constant insulator thin film at the surface of the silicon. To date, there is no universal technique that can address all types of TSV integration schemes, especially in the case requiring a low deposition temperature. In this work, an organosilicate polymer deposited by initiated chemical vapor deposition (iCVD) was developed and integrated as an insulating layer for TSVs. Process studies have shown that poly(1,3,5-trivinyl-1,3,5-trimethyl cyclotrisiloxane) (P(V3D3)) can present good conformality on high aspect ratio features by increasing the substrate temperature up to 100 °C. The trade-off is a moderate deposition rate. The thermal stability of the polymer has been investigated, and we show that a thermal annealing at 400 °C (with or without ultraviolet exposure) allows the stabilization of the dielectric films by removing residual oligomers. Then, P(V3D3) was integrated in high aspect ratio TSV (10 × 100 μm) on 300 mm silicon wafers using a standard integration flow for TSV metallization. Functional devices were successfully fabricated (including daisy chains of 754 TSVs) and electrically characterized. Our work shows that the metallization barrier should be carefully selected to eliminate the appearance of voids at the top corner of the TSV after the Cu annealing step. Moreover, an appropriate integration process should be used to avoid the appearance of cohesive cracks in the liner. This work constitutes a first proof of concept of the use of an iCVD polymer in a quasi-industrial microelectronic environment. It also highlights the benefit of iCVD as a promising technique to deposit conformal dielectric thin films in a microelectronic pilot line environment.

Supercritical CO2-Assisted Electroless Plating of Ultrahigh-Molecular-Weight Polyethylene Filaments for Weavable Device Application

This study reports on the use of supercritical CO2 (scCO2) for the metallization of ultrahigh-molecular-weight polyethylene (UHMW-PE) filaments, which are used as functional components in weavable devices. UHMW-PE is well known for its chemical and impact resistance, making it suitable for use in bulletproof clothing and shields. However, its chemical resistance poses a challenge for metallization. By utilizing scCO2 as the solvent in the catalyzation process, a uniform and defect-free layer of Ni-P is successfully deposited on the UHMW-PE filaments. The deposition rate of Ni-P is enhanced at higher temperatures during the scCO2 catalyzation. Importantly, the durability of the Ni-P-metalized UHMW-PE filaments is improved when the scCO2 catalyzation is carried out at 120 °C, as evidenced by minimal changes in electrical resistivity after a rolling test.

Deposition of hydrogenated amorphous carbon films by CH4/Ar capacitively coupled plasma using tailored voltage waveform discharges

Abstract We investigated effects of tailored voltage waveform (TVWs) discharges on deposition of hydrogenated amorphous carbon (a-C:H) films in CH4/Ar capacitively coupled plasma. TVWs discharges employ two driving radio frequencies (13.56 MHz and 27.12 MHz) and control their phase shift to independently regulate ion bombardment energy (IBE) and ion flux. In this study, a-C:H films were deposited by changing DC-self bias with phase shift and constant applied voltage peak-to-peak. Additionally, we investigated phase resolved optical emission spectroscopy (PROES) for plasma characterization. As a result, plasma enhanced chemical vapor deposition (PECVD) for a-C:H films using TVWs discharges realize control of film properties such as mass density, sp3 fraction and H content, with keeping deposition rate constant. Thus, it is suggested that TVWs discharges realize the independent control of IBE and ion flux with high accuracy, highlighting its utility in a-C:H film depositions.