The Monte Carlo model for the planar GaAs nanowire growth via the vapor–liquid-solid mechanism on GaAs substrate using a gallium droplet as a catalyst is realized. The effect of temperature, Ga and As2 deposition rates, substrate orientation and surface properties on the morphology of planar GaAs nanowires is considered. It is shown, that at the initial stages of nanowire growth, a 3D GaAs crystal is formed under a gallium droplet, which sets the nanowire growth direction. The range of temperatures and deposition rates of gallium and arsenic, which ensure the planar nanowire formation on the GaAs(111)A surface, is determined. The investigation of surface properties influence on the nanowire morphology showed that the arsenic diffusion influx into a gallium droplet is of critical importance for the planar GaAs nanowire growth. Ways for achieving a unidirectional growth of planar nanowires on singular and vicinal GaAs surfaces are proposed.
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