The electron-gun evaporation technique for the deposition of Au and Ag films onto (001) NaCl leads to a decrease in the epitaxial temperatures of these materials to 75° and 50°C respectively. This decrease has enabled us to use a wide range of temperatures for film recrystallization without destruction of the substrate. The annealing of the films on their substrates leads to a change in their orientation from metal (001)/NaCl (001) to metal (111)/NaCl (001). In the present work the experimental and kinetic conditions of this transformation process are given.