This study describes the synthesis of nanocrystalline titania layers on silicon and glass substrates by chemical solution deposition, using a water-based citratoperoxo-Ti(IV) precursor solution. The same aqueous solution–gel precursor is used for deposition of, both, thin dense layers by spin-coating and thicker porous layers by tape-casting. In the latter, the precursor solution is modified by the addition of polyvinyl alcohol (PVA), which acts as a thickener and pore-forming agent. Phase composition, film morphology, and the hydrophilic character of the films are studied by means of X-ray diffraction (XRD), scanning electron microscopy (SEM), transmission electron microscopy (TEM), UV–VIS transmission measurements, variable angle spectroscopic ellipsometry (VASE), and by contact angle measurements. The thin 180 nm titania film, deposited from the unmodified precursor solution, shows a density of about 96%. Upon ultraviolet illumination, it acquires a highly hydrophilic surface. One hour of illumination is sufficient to obtain a water contact angle of almost 0°. Furthermore, the hydrophilisation process shows to be reversible. Tape-casting and thermal treatment of the modified precursor solution gives rise to the formation of a 500 nm thick, porous, pure anatase film. The nanocrystalline thick film is composed of 20–40 nm particles, and contains clearly defined pores of 20 nm, homogeneously distributed along the surface.