The present work involves the numerical simulation and experimental study on the surface roughness evolution and heterogeneous plastic deformation (strain localization and concomitant surface morphology evolution) in grain scale of micro deep drawn parts of austenitic stainless steel (ASS) 304 foils. A three-dimensional modeling framework was used to simulate the micro deep drawing (MDD) process. The simulation involved the development of a Voronoi-based polycrystalline geometry model (VPGM), a multi-stress-strain response model, and a crystal plasticity finite element methods (CPFEM) model. The results indicate that CPFEM model exhibits higher accuracy in the localized stress and strain, thickness distribution fluctuation and surface roughness evolution of the fabricated parts compared to multi-stress-strain response model. Therefore, the plastic deformation heterogeneity in MDD is in-depth discussed based on CPFEM model. The results show that the coarse-grained foils correspond to the intense strain localization, which is the main cause of surface roughening. Considering the average grain size is close to the thickness of ASS foils, mounding features on the rough surface may readily develop further into potentially fractured sites during deformation. On the other hand, crystal orientation influence plastic deformation by affecting the slip behavior of materials. The effect of crystal orientations including {011} 〈211〉 (Brass), {011} 〈100〉 (Goss), and {112} 〈110〉 components on deformation is discussed. The results indicate a strong correlation between the magnitude of the Schmid's factor and the ease of deformation. Additionally, variations in Schmid's factor across different directions result in differences in deformation accumulation, which affects the thickness distribution along the radial direction and the distribution of earrings and wrinkles along the circumferential direction of the fabricated micro parts.