This paper has been described precisely process of Wire Electrode EDM.First chapter, we describe introduction on this paper.After of second chapter, we describe relation between wire bending and wire tension, residual stress of tungsten wire, shape of chip in the water, relation between tension fluctuate and deflection of wire, and locus compensation which is based on wire electrode bending.We have some conclusion under that. Wire tension is most important control factor. Tension should choose as strong as possible. Tungsten and molybdenum wire electrode must have annealing process for removal residual stress. Processing chip in the water consist melted group (diameter is 0.1-several micron) and evaporated group (several 10-200Å). By the locus compensation, machining accuracy is improved at the corner part.