• Piezoelectric coefficient of Fe 3+ -Li + co-doped ZnO thin film is significantly enhanced by constructing acceptor-donor Fe 3+ -Li + ionic pairs in ZnO structure. • The Fe 3+ -Li + co-doped ZnO film has a large linear electrostrain. • The high permittivity has been obtained which is about one order of magnitude larger than that of pure ZnO film. • The piezoelectric performance of the films can be further improved by thermo-electrically treatment. In this paper we present the effective strategy of Fe 3+ and Li + co-doping to enhance the electrostrain of ZnO thin films. Zn 0.88 (Fe 0.06 Li 0.06 )O thin film exhibits an excellent d 33 * value of 415 pm/V and large linear electrostrain of 0.68% after thermal-electric treatment. Both the X-ray diffraction and first principle calculation results have indicated that the Fe 3+ and Li + ions are inclined to adopt a preferential alignment along the edges approximately parallel to [001] direction in the zinc-oxygen tetrahedron and constitute a defect dipole (ionic pairs). It is considered that the local lattice distortion and the electric field-triggered polarization extension and rotation generated by preferential distributed Fe 3+ -Li + ionic pairs are responsible for the outstanding piezoelectric properties and large linear electrostrain.
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