Donor compensation by associates of donor impurities and cation vacancies is investigated in vapor grown ZnSe : I and Al diffused melt grown bulk crystals. Both the (I SeV Zn) and the (Al ZnV Zn) A-centers could be identified by electron paramagnetic resonance (EPR) spectroscopy. The concentrations of the compensating defects can be reversibly changed by vapor-phase equilibration and a reproducible adjustment of room temperature (RT) carrier concentrations n e up to 1.4×10 18 cm −3 (ZnSe : I) and 2.7×10 18 cm −3 (ZnSe : Al) is possible. The results are explained in terms of a defect chemical model. The supposed high concentrations of one type of vacancy associated defects are confirmed using positron annihilation (PA). Lowered compensation leads to an increase of carrier mobility μ e with increasing n e. In low doped systems mobilities of 500 cm 2/Vs can be obtained. A similarly drastic shift of the absorption edge to lower photon energies is observed for both I- and Al-doped crystals.
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