Deep Sub-wavelength Imaging Research Articles

Going far beyond the near-field diffraction limit via plasmonic cavity lens with high spatial frequency spectrum off-axis illumination.

For near-field imaging optics, minimum resolvable feature size is highly constrained by the near-field diffraction limit associated with the illumination light wavelength and the air distance between the imaging devices and objects. In this study, a plasmonic cavity lens composed of Ag-photoresist-Ag form incorporating high spatial frequency spectrum off-axis illumination (OAI) is proposed to realize deep subwavelength imaging far beyond the near-field diffraction limit. This approach benefits from the resonance effect of the plasmonic cavity lens and the wavevector shifting behavior via OAI, which remarkably enhances the object’s subwavelength information and damps negative imaging contribution from the longitudinal electric field component in imaging region. Experimental images of well resolved 60-nm half-pitch patterns under 365-nm ultra-violet light are demonstrated at air distance of 80 nm between the mask patterns and plasmonic cavity lens, approximately four-fold longer than that in the conventional near-field lithography and superlens scheme. The ultimate air distance for the 60-nm half-pitch object could be theoretically extended to 120 nm. Moreover, two-dimensional L-shape patterns and deep subwavelength patterns are illustrated via simulations and experiments. This study promises the significant potential to make plasmonic lithography as a practical, cost-effective, simple and parallel nano-fabrication approach.

Vectorial near-field imaging of a GaN based photonic crystal cavity

We report a full optical deep sub-wavelength imaging of the vectorial components of the electric local density of states for the confined modes of a modified GaN L3 photonic crystal nanocavity. The mode mapping is obtained with a scanning near-field optical microscope operating in a resonant forward scattering configuration, allowing the vectorial characterization of optical passive samples. The optical modes of the investigated cavity emerge as Fano resonances and can be probed without the need of embedded light emitters or evanescent light coupling into the nanocavity. The experimental maps, independently measured in the two in-plane polarizations, turn out to be in excellent agreement with numerical predictions.

Ultra-subwavelength phase-sensitive Fano-imaging of localized photonic modes

Photonic and plasmonic devices rely on nanoscale control of the local density of optical states (LDOS) in dielectric and metallic environments. The tremendous progress in designing and tailoring the electric LDOS of nano-resonators requires an investigation tool that is able to access the detailed features of the optical localized resonant modes with deep-subwavelength spatial resolution. This scenario has motivated the development of different nanoscale imaging techniques. Here, we prove that a technique involving the combination of scanning near-field optical microscopy with resonant scattering spectroscopy enables imaging the electric LDOS in nano-resonators with outstanding spatial resolution (λ/19) by means of a pure optical method based on light scattering. Using this technique, we investigate the properties of photonic crystal nanocavities, demonstrating that the resonant modes appear as characteristic Fano line shapes, which arise from interference. Therefore, by monitoring the spatial variation of the Fano line shape, we locally measure the phase modulation of the resonant modes without the need of external heterodyne detection. This novel, deep-subwavelength imaging method allows us to access both the intensity and the phase modulation of localized electric fields. Finally, this technique could be implemented on any type of platform, being particularly appealing for those based on non-optically active material, such as silicon, glass, polymers, or metals. A purely optical method for realizing ultra-subwavelength phase-sensitive imaging of localized photonic modes has been developed. The technique combines scanning near-field optical microscopy with resonance scattering spectroscopy and involves monitoring the spatial variation of the Fano resonance line shape in photonic-crystal nanocavities. Using the technique, Niccolo Caselli and co-workers in Italy, the USA, the UK, and the Netherlands realized a spatial resolution of λ/19 (where λ is the wavelength) for the electric local density of optical states (LDOS). The technique can be applied to resonators made from any kind of material and over a wide spectral range. Furthermore, it does not suffer from bleaching or tip-induced perturbation. This demonstration opens up new strategies for investigating the electric LDOS and phase distribution of modes in a wide range of nanophotonic and nanoplasmonic resonators.

Deep-subwavelength imaging of both electric and magnetic localized optical fields by plasmonic campanile nanoantenna.

Tailoring the electromagnetic field at the nanoscale has led to artificial materials exhibiting fascinating optical properties unavailable in naturally occurring substances. Besides having fundamental implications for classical and quantum optics, nanoscale metamaterials provide a platform for developing disruptive novel technologies, in which a combination of both the electric and magnetic radiation field components at optical frequencies is relevant to engineer the light-matter interaction. Thus, an experimental investigation of the spatial distribution of the photonic states at the nanoscale for both field components is of crucial importance. Here we experimentally demonstrate a concomitant deep-subwavelength near-field imaging of the electric and magnetic intensities of the optical modes localized in a photonic crystal nanocavity. We take advantage of the “campanile tip”, a plasmonic near-field probe that efficiently combines broadband field enhancement with strong far-field to near-field coupling. By exploiting the electric and magnetic polarizability components of the campanile tip along with the perturbation imaging method, we are able to map in a single measurement both the electric and magnetic localized near-field distributions.

Deep sub-wavelength imaging lithography by a reflective plasmonic slab

By utilizing a reflective plasmonic slab, it is demonstrated numerically and experimentally in this paper deep sub-wavelength imaging lithography for nano characters with about 50 nm line width and dense lines with 32 nm half pitch resolution (about 1/12 wavelength). Compared with the control experiment without reflective plasmonic slab, resolution and fidelity of imaged resist patterns are remarkably improved especially for isolated nano features. Further numerical simulations show that near field optical proximity corrections help to improve imaging fidelity of two dimensional nano patterns.

Improving deep subwavelength imaging through terminal interface design of metallo-dielectric multilayered stacks

Symmetric metallo-dielectric multilayered stacks (MDMS) are investigated to improve the spatial resolution of subwavelength imaging operated in canalization regime. Simulation results revealed that subwavelength imaging capability is very sensitive to the thickness and material of the MDMS terminal layers. Furthermore, the coupling and decoupling of the Bloch modes in MDMS, between the object and image space, strongly depend on the terminal layer parameters which can be tuned to achieve the optimal imaging improvement. In contrast to metal-dielectric periodic MDMS, using MDMS with the developed symmetric surface termination, subwavelength imaging with optimal intensity throughput and improved field spatial resolution (∼20.4% ) can be obtained. Moreover, optical singularity, in the form of Poynting vector saddle point, has been found in the free space after lens exit for the two kinds of symmetric MDMS that exhibit improved superresolution imaging performance with 100% energy flux visibility. The improved subwavelength imaging capabilities, offered by this proposed termination design method, may find potential applications in the areas of biological imaging, sensing, and deep subwavelength lithography, and many others.

Deep-subwavelength imaging of the modal dispersion of light

Numerous optical technologies and quantum optical devices rely on the controlled coupling of a local emitter to its photonic environment, which is governed by the local density of optical states (LDOS). Although precise knowledge of the LDOS is crucial, classical optical techniques fail to measure it in all of its frequency and spatial components. Here, we use a scanning electron beam as a point source to probe the LDOS. Through angular and spectral detection of the electron-induced light emission, we spatially and spectrally resolve the light wave vector and determine the LDOS of Bloch modes in a photonic crystal membrane at an unprecedented deep-subwavelength resolution (30-40 nm) over a large spectral range. We present a first look inside photonic crystal cavities revealing subwavelength details of the resonant modes. Our results provide direct guidelines for the optimum location of emitters to control their emission, and key fundamental insights into light-matter coupling at the nanoscale.

Demagnifying far field focusing spot to deep subwavelength scale by truncated hyperlens for nanolithography

A truncated hyperlens composed of pairs of metal-dielectric cylindrical multilayers is proposed to demagnify the diffraction limited spot to achieve deep subwavelength imaging. The diffraction limited spot is focused by far field converging cylindrical wave. Numerical simulations demonstrate that full width at half maximum (FWHM) of the image down to 32nm (∼λ/11) can be achieved from object (∼λ/3) by 365nm light illumination. It is discussed that the influence of size and focusing shift of the spot on those of the demagnification image on photoresist. It is also demonstrated that multi-objects can be demagnified and projected on the photoresist.

A holey structured acoustic metamaterial

The resolution of acoustic imaging system is restricted by diffraction limit. To beat this limit, early research shows acoustic metamaterials that can manipulate acoustic waves artificially and may act as lens to achieve subwavelength resolution. However, these solutions suffer significant loss therefore lack convincing experimental demonstration. Recent study suggested that arrays of metallic nanorods or nanowire can be used as lens for optical imaging at subwavelength resolution. Similar acoustic hyperlens designs have also been explored, and latest experimental result provided resolution of wavelength/7. Here presented is a holey structured endoscope which supports the transmission of the otherwise-evanescent waves over distances, therefore beating diffraction limit and achieving deep subwavelength imaging. Experimental demonstration shows clear image with feature size of wavelength/50. Such a metamaterial endoscope brings new perspectives to the applications of medical ultrasonography, sonar and ultrasonic non-destructive evaluation.

A holey-structured metamaterial for acoustic deep-subwavelength imaging

For classical waves such as light or sound, diffraction sets a natural limit on how finely the details of an object can be recorded on its image. Recently, various optical superlenses based on the metamaterials concept have shown the possibility of overcoming the diffraction limit1,2,3,4,5,6,7. Similar two-dimensional (2D) acoustic hyperlens designs have also been explored8,9,10. Here we demonstrate a 3D holey-structured metamaterial that achieves acoustic imaging down to a feature size of λ/50. The evanescent field components of a subwavelength object are efficiently transmitted through the structure as a result of their strong coupling with Fabry–Pérot resonances inside the holey plate. This capability of acoustic imaging at a very deep-subwavelength scale may open the door for a broad range of applications, including medical ultrasonography, underwater sonar and ultrasonic non-destructive evaluation.