In this study, the process of decomposition of carbon tetrachloride (CCl4) vapor in oxygen DBD at atmospheric pressure and its kinetic regularities have been studied. In the course of the experiments, it was shown that the efficiency of the decomposition of carbon tetrachloride in DBD can reach 100%. Depending on the conditions of the experiments, the effective rate constants were equal to (0.16–0.59) s−1, and the decomposition energy yields were (0.001–0.012) molecules per 100 eV of the inputed energy. The main decomposition products were CO2 and Cl2 molecules. The formation of a solid on the internal electrode of the reactor was also found. The substance contains atoms of carbon, oxygen, chlorine (C:O:Cl) = 1:0.38:0.01, as well as hydrogen atoms. The substance also contains functional groups –CH, –CH2, –OH and dimers of carboxylic (chlorocarboxylic) acids. Based on the solution of the Boltzmann equation for electrons, it is shown that for the compositions of a gas containing O2 molecules, ССl4, and decay products, the kinetic and transport characteristics of electrons are the same as in a pure oxygen discharge. Using the kinetic characteristics of electrons and the reaction rate constants the mechanisms of reactions leading to the found reaction products are proposed. It was shown that the primary reaction of destruction is the reaction of dissociation of CCl4 by electron impact, leading to the formation of CCl3• and Cl and the reaction with the O (1D) atom, as a result of which CCl3• and ClO• are formed.