Non-thermal plasma (NTP) driven catalytic decomposition of gas-phase benzene under oxygen plasma was carried out at room temperature over silver on titanium dioxide catalysts. Three preparation methods were investigated as well as the effect of silver loading amount. The catalysts were prepared using impregnation method (IP), deposition–precipitation method with NaOH (DPN), and deposition–precipitation method with H2O2 (DPH) with 1, 3 and 5 % silver loading by weight. The catalysts were characterized using XRD, XPS, SEM–EDS and N2 adsorption, and the catalytic activity was tested on 200 ppm benzene. Low energy treatment by NTP alone only showed insignificant change in benzene concentration but upon the addition of catalysts, IP catalysts were able to decompose the pollutant up to 20 % and with DPN and DPH catalysts up to 100 %. DPN catalysts were also able to decompose the ozone produced in the reactor. The 3 % Ag/TiO2 prepared by DPN method showed the highest energy efficiency capable of decomposing benzene at 392 g/kWh.
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