The influence of MeV ion beams on the measured intensity of the surface peak (SP) in channeling studies has been examined for Ag and/or Au covered Si(111), and Pd covered Si(111) systems with film thicknesses up to several monolayers. A simple phenomenological model is introduced to analyse the observed increase in atomic displacements induced by probing He ions of 1 MeV. For the Ag and Pd cases, effects attributable to the deposited metal was small while for Au an appreciable enhancement of the beam sensitivity was observed which increases with increasing Au thickness for beam doses of ⩽ 3.1 × 10 16 ions/cm 2. The observe differences cannot be explained by the difference in mass and atomic number of the overlayer atoms. The model suggests that the chemical nature of atomic bonds near the interface affects the damage threshold energy.
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