In the process of abrasive water jet cutting, the change of nozzle diameter, due to nozzle wearing throughout cutting process, causes a decrease in surface quality and an increase in kerf width. In this paper, a series of experiments have been done to determine the effect of process parameters and the results show that traverse speed and nozzle diameter are significant parameters on the kerf quality and geometry, and a control program algorithm is suggested to compensate the effect of nozzle diameter increase on cut surface quality and kerf width and the control program creates an offset with required amount in nozzle path.