This is a review of direct growing high-quality In x Ga1− x As or InP buffer layers on GaAs substrates by metal-organic chemical vapour deposition (MOCVD). This low-temperature growth method benefits the improvement of metamorphic device performance. A simple and novel method of directly depositing thin In x Ga1− x As or InP buffer layers (<1 µm) on GaAs substrates is presented, instead of the strained-layer superlattice, two-step, graded or CS (compliant substrates) methods, while maintaining low dislocation density, high crystal quality, uniform and mirror-like surfaces. For the direct growth technique of In x Ga1− x As on GaAs, we found that an excellent quality In0.54Ga0.46As buffer of r.m.s surface roughness of only 0.686 nm by AFM and FWHM of 925 arcsec by XRD can be obtained at a low growth temperature of 440°C with a constant Ga/Ingas partial pressure of 5. An MIS-like Schottky diode with Au/i-InGaAs/n+-GaAs structure is investigated to check the film quality. A distinguished I–V characteristic with cut-in voltage of 0.23 V and reverse breakdown of 3 V, corresponding to the electric field of 2 × 105 V cm−1, is also achieved. The superior results are mainly due to the use of low-temperature growth technology. In addition, we also found this growth technology is available to directly grow the InP buffer layers on GaAs. Experimental results conclude that the growth temperature of 480°C in harmony with the V/III ratio range of 130–210 is a suitable window to directly grow InP on GaAs substrates. Contents 1. Introduction 48 1.1. Background of the development of metamorphic high electron mobility transistors (HEMTs) 48 1.2. Difficulties of the development of MHEMTs 49 1.3. Direct growth of InxGa1-xAs and InP on GaAs substrates 51 2. Overview of MOCVD system 51 2.1. Reactor design and gas control system 53 2.2. Gas system and components 54 2.3. Gas blending unit 54 2.4. Planetary reactor with heated susceptor 55 2.5. Vacuum system 56 2.6. Scrubbing system 57 2.7. Source molecules 57 2.8. Useful formulas for the epitaxial parameter control 58 3. Growth of metamorphic epilayers on GaAs by LP-MOCVD 59 3.1. Vertical MOCVD reactor 59 3.2. Material sources 59 3.3. Epitaxial conditions and environment control 60 3.4. Investigation of the film quality by direct growth technology 61 3.5. Carbon contamination (dependent on the group V partial pressure) 61 3.6. Temperature dependence of the In0.25Ga0.75As on GaAs substrate 61 3.7. Direct growth of high-quality In0.53Ga0.47As metamorphic layers on GaAs substrates 63 3.8. Effect of growth rates on film quality 66 3.9. I–V characteristics of MIS-like InGaAs Schottky diode 68 4. Growth of InP on GaAs 68 4.1. Instruments for measurement 69 4.2. Photoluminescence spectroscopy (PL) analysis 69 4.3. Surface morphology and XRD analysis 71 4.4. Effect of V/III ratios 74 5. Conclusion 77 Acknowledgements 77 References 78 Subject Index 80
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