Chalcopyrite films of Cu(Ga, In)Se 2 are well known as highly efficient absorbers for thin film solar cells. In order to obtain multinary semiconducting films with optimized properties deposition conditions ( i.e. metal fluxes) have to be controlled precisely. This is especially important in the manufacture of large area devices. Films have been prepared by simultaneous thermal evaporation of the single elements in a high vacuum system. The fluxes of the metals are controlled by a quadrupole mass spectrometer with a cross-beam ion source. Reproducibility and precision have been improved in comparison with temperature-controlled crucibles. A special concentric source that can independently control two (or three) different species has been designed. Its application has demonstrated the possibility of producing large area films with high homogeneity in composition. The first monolithically integrated modules have been prepared with conversion efficiencies up to 6.7%.
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