We studied the sintering process of sol‐gel‐prepared monodisperse submicrometer CeO2 spheres by examining the microstructural changes of single spherical particles after successive heat treatment in oxygen up to 850°C using transmission electron microscopy. Steps of organic phase removal, CeO2 crystallization, grain growth, and particle condensation were clearly illustrated. Grain‐size and sphere‐diameter changes were measured quantitatively using this technique. CeO2 particles were found to be highly porous until collapse, which occurred at~850°C.
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