Extremely fast glassification and recrystallization of chalcogenide films can be achieved by pulse (<1 μs) laser irradiation; the crystallization of amorphous films takes place under larger non-equilibrium conditions. Some structural change properties, such as metastable phase formation and inhomogeneous crystallization in the sub-micrometer domain, are reported in this paper. Computer modelling of the melting and recrystallization processes are presented, and experimentally verified by transient reflectivity change measurement. Transmission electron microscope (TEM) images and electron diffraction (ED) patterns of the micro-domains of chalcogenide films, irradiated by laser beams of different energies and pulse durations, are presented. Acceleration of the crystallization speed in micro-domains of chalcogenide films under laser irradiation is discussed.
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