BiFeO3 (BFO) thin films were grown on OH-functionalized organic self-assembled monolayers (SAMs) via liquid-phase deposition (LPD) method at a temperature below 100°C. The BiFeO3 thin films were induced to synthesize on the OH-functionalized organic OTS monolayers prepared on hydroxylated glass substrate by self-assembling technique. The hydrophilic characteristic of the as-prepared OTS-SAMs was measured by contact angle tester. The crystal phase composition, microstructure and topography of the as-synthesized BFO thin films were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM), energy disperse spectroscopy (EDS) and atomic force microscope (AFM), respectively. Results show that compact and homogeneous BFO thin films can be formed on the OH-functionalized SAMs at low temperature.