MFI-type zeolite membranes were prepared by the template-free secondary growth method followed by onstream counter-diffusion or one-side chemical vapor deposition (CVD) modification to eliminate intercrystalline pores. Gas permeation and separation experiments were conducted on unmodified and modified membranes at 25−500 °C. For unmodified MFI-type zeolite membranes, single-gas permeation of H2, He, CO, and CO2 exhibits characteristics of Knudsen diffusion up to 500 °C, and adsorption of CO2 on MFI-type zeolite has a strong effect on ternary gas separation (H2, CO, and CO2) below 300 °C. Counter-diffusion CVD modification is effective in sealing the intercrystalline gaps resulting in defect-free MFI-type zeolite membranes. Permeation of nonadsorbing gases (He, H2, and CO) through counter-diffusion CVD-modified zeolite membranes also exhibits Knudsen diffusion characteristics with very small activation energies for diffusion (0.1−3 kJ mol−1), with gas permeance (diffusivity) decreasing with increasing mole...