We report some comparative results on cubic AlxGa1−xN/GaN nanostructures MODFET and MOS-MODFET. The drain current characteristics of cubic AlxGa1−xN/GaN MODFET and MOS-MODFET are simulated by changing the different device parameters such as Al content x and the cubic GaN buffer layer thickness using 2D nextnano3 numerical simulation software. Drift–diffusion model has taken for simulating the proposed device. These results clearly indicate that the transistor simulation with 5nm isolator SiO2 layer thickness under the gate, Al content of x=25% and 200nm cubic GaN buffer layer thickness shows the tremendous I–V characteristics. Also, this structure shows an increase of the drain saturation current and a decrease in the threshold voltage. Moreover, our simulation results exhibited lower threshold voltage and higher drain current density of MOS-MODFET is a factor 30% higher than the same current of a conventional MODFET. The MODFET with 5nm isolator SiO2 layer thickness has been much better performance. To avoid current flow through the high conductive 3C-SiC substrate a 150nm p-doped cubic GaN layer is deposited. A comparison between our experimental and simulation results are shown to be in good agreement for cubic Al0.25Ga0.75N/GaN nanostructures MOS-MODFET. The demonstrated MOS-MODFET will be attractive for the next-generation microwave and high power switching application fields.