ABSTRACT Silicon nitride (Si3N4) ceramic is a typically difficult-to-machine material and has been one preferred material for functional microstructures like heat dissipators, reactors, mixers and so on. However, the processing capabilities of conventional manufacturing techniques are inadequate in machined quality and efficient for Si3N4 microstructures with large-aspect ratio (LAR). Waterjet-assisted laser machining (WJALM) is a method that introduces the waterjet assistance into the laser-only machining (LOM) process, thus combining the advantages of LOM with the impact and cooling effects of the waterjet. This makes WJALM become an ideal approach for fabricating LAR microstructures on silicon nitride ceramic. This research concentrates on multi-objective optimization of aspect-ratio (AR) and ablation-area ratio (AAR) of LAR microgrooves by orthogonal experiments and Grey-relational analysis (GRA). Optimal waterjet-laser composite parameters are obtained, and the optimized AR and AAR is 3.324 and 80.1%, respectively.
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