In order to solve the coupled hysteresis and resonance problems in three-degree-of-freedom tip-tilt-piston piezoelectric stage, a coupled hysteresis model and a coupled integral resonance compensation model are designed. The inverse coupled hysteresis feedforward control combined multi-axis coupled resonance control and high-gain integral tracking controller are used to improve the tracking speed and positioning accuracy of the stage. Firstly, a kinematic model of the stage is built to translate the three-degree-of-freedom motion of the end-effector into the outputs of three piezoelectric actuators. Then, a coupled hysteresis model based on the rate-dependent Prandtl–Ishlinskii model is established and parameterized to simultaneously compensate for the hysteresis of a single piezoelectric actuator and the coupled hysteresis between multiple piezoelectric actuators. The effectiveness of the model is verified by open-loop and closed-loop inverse model feedforward control experiments. Afterwards, a coupled integral resonance compensation model is also established and parameterized to suppresses the resonance and expand the system bandwidth. Finally, the proposed controller is used to conduct tracking experiments on a composite signal, and the results show that the accuracy and speed of trajectory tracking are further improved, and the mechanical coupling between axes are significantly reduced.
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