Germanium single crystals were deformed by static compression at various stresses up to various points of the creep curve. The dislocation density N and the plastic slip were determined in crystal areas as small as possible. This yields a stress dependent relation between both quantities, which follows from a dislocation multiplication law of the form dN = NK( τ − A√ N) v dt (“exponential type”). The validity of this relation along the entire creep curve and the stress dependence cannot be explained in terms of a model of constant source density during the deformation. The following values are found for the constants: K = 10.5 mm kp and A = 5.5.10 −4 kp mm .