Conductive graphitic carbon films were fabricated from insulating polystyrene (PS) by ion beam irradiation and subsequent thermal treatment, and used as a transparent anode for organic solar cells (OSCs). Analyses of optical and chemical properties revealed that the thermally resistant oxidized carbon clusters in the PS precursors (spin-coated on quartz) were efficiently generated by ion beam irradiation at a fluence of 2 x 1016 ions/cm2, and transformed to graphitic carbon thin films through high-temperature treatment. The graphitic carbon films exhibited thickness-dependent conductivity (the highest conductivity of 374 S/cm), while their work function (5.20 eV) and surface roughness (0.560–0.596 nm) were unaffected by the thickness of the films. Furthermore, the introduction of the 10.2 nm-thick graphitic carbon films into poly(3-hexylthiophene) (P3HT): [6,6]-phenyl-C61 butyric acid methyl ester (PCBM)-based OSCs resulted in a power conversion efficiency (PCE) of 1.40%, demonstrating the feasibility of using the graphitic carbon films as transparent electrodes.