To increase the surface hydrophobicity of organic-inorganic copolymers containing nanostructured polytanoxide, they were modifified with flfluorine-containing monomers which were introduced into the composition of the monomer mixture, followed by polymerization-polycondensation. The flfluorinated monomers used were 2,2,3,3,4,4,5,5-octaflfluoropentylacrylate, 1,1,1,3,3,3-hex aflfluoroisopropylacrylate, 2,2,3,3-tetraflfluoropropylmethacrylate. The surfaces of the synthesized terpolymers were examined by X-ray flfluorescence analysis and atomic force microscopy. The inflfluence of the nature of the third monomer on the content of titanium and flfluorine atoms in the surface layer and in the chips of the samples as well as on the topography of their surface was determined. The difference in the elemental composition affects the initial hydrophobicity of the samples surface and their ability to hydrophilize the surface under UV exposure. Terpolymers with 1,1,1,3,3,3-hexaflfluoroisopropylacrylate links exhibit the highest wetting angle - 102° - in the absence of UV exposure. However, the "hydrophobicity-hydrophilicity" switching mode is most clearly seen in the terpolymers with 2,2,3,3,4,4,5,5-octaflfluoropentylacrylate links when the wetting angle can be reversibly changed from 86° to 10°.