Composition Of PZT Films Research Articles

Pengaruh Suhu Sintering Terhadap Prosentase Tetragonal Dan Rhombohedral Pada Perbandingan Zr/Ti (60/40)

The synthesis of lead zirconate titanate (PZT) with ratio Zr:Ti of 60:40 have been conducted by sol gel method. The precursor of PZT were prepered from zirconium(IV) nitrate pentahydrate, titanium(IV) butoxide, lead(II) acetate trihydrate and 2-methoxyethanol and acetylaceton as a stabilizer solution. The PZT films deposited on Si substrate by spin coating method, then it was sintered at different temperature of 500°C, 600°C and 700°C. The crystal structure and composition of PZT films were observed by X-ray Diffraction (XRD) and Scanning Electron Microscopy-Energy Dispersive X-ray (SEM-EDX). The XRD results show the crystal orientation of PZT (100), (101), (110), (111), (002)T, (200)R, (200)T, (201) and (210), means that all PZT films are polycrystalline. Moreover, the orientation of (110) as temperature sintered of 600°C show the highes intensity than other temperature. The EDX results show mole fraction of Zr and Ti decrease compound with iniatial precursor. On the other hand, the mole fraction of O increase, which result in the existence of ZrO 2 and TiO 2 crystal.

Study of properties of nanoscale lead zirconate titanate films

Characteristics of lead zirconate titanate (PZT) alloy films 50–200 nm thick grown on sapphire and silicon substrates by low-temperature synthesis from Ti52Zr48 alloy films were studied. The surface morphology and composition of PZT films were studied and some electrical characteristics of the obtained coatings were determined. The occurrence of the piezoelectric effect in films was observed by the Sawyer-Tower method, as was the dependence of the shape of the hysteresis loop on the value and frequency of the applied voltage.