Abstract
Characteristics of lead zirconate titanate (PZT) alloy films 50–200 nm thick grown on sapphire and silicon substrates by low-temperature synthesis from Ti52Zr48 alloy films were studied. The surface morphology and composition of PZT films were studied and some electrical characteristics of the obtained coatings were determined. The occurrence of the piezoelectric effect in films was observed by the Sawyer-Tower method, as was the dependence of the shape of the hysteresis loop on the value and frequency of the applied voltage.
Full Text 
Sign-in/Register to access full text options
Sign-in/Register to access full text options 
Published version (
Free)
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
