In this paper, a new multi-frequency excitation method based on combination resonance is introduced to enhance the non-contact atomic force microscopy performance. In combination resonance, excitation frequencies are selected so that summation/subtraction of excitation frequencies is close to the natural frequencies of the microcantilever. Due to the nonlinear nature of this method, the probe response to excitation is very sensitive to change in tip-sample forces. This could be used to generate high-resolution compositional mapping and topographical images of the surface. The present study reveals that both amplitude and phase shift of the combination resonance are sensitive to change in parameters such as Hamaker constant, damping coefficient, Young’s modulus and tip-sample initial distance. It is observed that because of high sensitivity to Hamaker constant a small change in the surface material leads to considerable variations in amplitude and phase shift. This sensitivity is employed to improve compositional mapping of the surface materials. It is also found out that the response amplitude in the combination resonance is very sensitive to change in the tip-sample initial distance. This sensitivity may be used to reduce the vertical noise and increase image resolution, especially in environments with low quality factors. Overall, using this technique the image contrast increases significantly and high resolution compositional mapping of surfaces is achieved.
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