Colloidal Silica Particles Research Articles

Water-Enhancing Gels Exhibiting Heat-Activated Formation of Silica Aerogels for Protection of Critical Infrastructure During Catastrophic Wildfire.

A promising strategy to address the pressing challenges with wildfire, particularly in the wildland-urban interface (WUI), involves developing new approaches for preventing and controlling wildfire within wildlands. Among sprayable fire-retardant materials, water-enhancing gels have emerged as exceptionally effective for protecting civil infrastructure. They possess favorable wetting and viscoelastic properties that reduce the likelihood of ignition, maintaining strong adherence to a wide array of surfaces after application. Although current water-enhancing hydrogels effectively maintain surface wetness by creating a barricade, they rapidly desiccate and lose efficacy under high heat and wind typical of wildfire conditions. To address this limitation, unique biomimetic hydrogel materials from sustainable cellulosic polymers crosslinked by colloidal silica particles are developed that exhibit ideal viscoelastic properties and facile manufacturing. Under heat activation, the hydrogel transitions into a highly porous and thermally insulative silica aerogel coating in situ, providing a robust protective layer against ignition of substrates, even when the hydrogel fire suppressant becomes completely desiccated. By confirming the mechanical properties, substrate adherence, and enhanced substrate protection against fire, these heat-activatable biomimetic hydrogels emerge as promising candidates for next-generation water-enhancing fire suppressants. These advancements have the potential to dramatically improve the ability to protect homes and critical infrastructure during wildfire.

Convective assembly of silica colloidal particles inside photonic integrated chip-based microfluidic systems for gas sensing applications.

Optofluidics is a new field of modern science that stands at the interface of microfluidics and photonics and has good prospects for application in gas sensors. Microfluidics offers a promising platform for tuning and assembling monolayer structures that are used as sensitive layers for gas detection. Herein, we evaluate the concept of monolayer formation on a silicon nitride substrate enabling a surface coverage up to 59% through a microfluidic convective assembly and couple it with a photonic integrated chip to probe gas sensing performance.

Enhanced particle removal ability of two representative nonionic surfactants: A reasonable interpretation based on DFT and coarse-grained molecular dynamics methods

Cleaning of copper surfaces after chemical mechanical polishing is indispensable for removing particle residues, which is a critical step in integrated circuits manufacturing. This paper introduces two nonionic surfactants, coconut oil diethanolamine (CDEA) and fatty alcohol polyoxyethylene ether (AEO-9), into a basic alkaline cleaning solution comprising tetraethyl ammonium hydroxide and lysine to investigate their abilities to enhance particle removal performance. Cleaning performance was measured with scanning electron microscopy, which showed that the two surfactants achieved excellent particle removal efficiency (above 95 %), with CDEA performing slightly better in all tested concentrations. Concerning critical micelle concentration, surface tension tests showed that CDEA (at 1500 ppm) had superior wettability and dispersive capacity compared with AEO-9 (at 2000 ppm) and could prevent particle redeposition more effectively. Using density functional theory, CDEA was found to have more polar groups to form hydrogen bonds with the hydrophilic surface of colloidal silica particles or bond with the copper substrate, explaining CDEA’s ability to lower the surface tension of the cleaning solution and improve the zeta potential between particles and the copper substrate. Finally, based on the Martini forcefield, simulations of coarse-grained molecular dynamics provided valuable theoretical insights into the different dispersion abilities of the two nonionic surfactants that CDEA had a more significant diffusion coefficient (0.073 Å2/ps) and was able to form micelles more efficiently in solution compared with that of AEO-9 (0.066 Å2/ps).

Investigate the influence of GO as an additive in the silica-based polyethylene glycol shear thickening fluid on the rheological properties

Abstract Shear thickening fluids (STF) represent stabilized and concentrated colloidal suspensions, wherein hard nanoparticles are dispersed within a liquid medium (polymer). Under the influence of impact forces, they exhibit non-Newtonian behavior, effectively dissipating energy through shear thickening. The optimization of the dispersion medium’s viscosity is critical, as it not only fosters shear thickening but also facilitates proper particle dispersion. This study investigates the impact of graphene oxide (GO) as an additive in STFs, analyzing both static and dynamic rheological properties. STFs were formulated using colloidal silica particles (600 nm) and polyethylene glycol (PEG-200), with varied concentrations of GO particles (0.12–0.5 % w/W). The systems underwent comprehensive analysis concerning steady-state and dynamic-state rheological behavior under diverse conditions. The findings reveal that the inclusion of GO augments both static and dynamic rheological properties, reaching an apex at an optimal concentration of 0.36 % w/W. GO functions as a network builder within the STF, interacting with the existing particle network to create a more robust and interconnected structure. These enhanced properties underscore the potential of the synthesized STF for applications requiring impact resistance.

Surface charge engineering for structural control of colloidal silica rod-decorated silica particles and their flexible integration into magnetic core–multishell structures

In this study, the effect of surface modification and the resulting surface charge of colloidal silica seeds on the growth of silica rods during an emulsion droplet-based process is investigated. Through electrostatic interactions between negatively charged poly(vinylpyrrolidone) (PVP) and seed surfaces, significant PVP adsorption occurs as the seed surfaces are modified with positively charged cationic substances and then aged with PVP. This surface charge-enhanced PVP adsorption promotes the anchoring of water emulsion droplets, serving as the starting point for the growth of silica rods on the seed surfaces and leading to a high yield of silica rod-decorated particles during emulsion droplet-based growth. The surface properties, including surface charge and hydrophobicity, can be further modified by applying different cationic modifiers, which influence the morphology, structural architecture, and yield of the final product. We further demonstrated the versatility of this approach by successfully generating silica rod-decorated magnetic core (Fe3O4)–multishell (silica/polystyrene/titania) particles. The findings of this study highlight the critical role of surface charge engineering in controlling the structure and morphology of silica rod-decorated silica particles as well as their integration into complex multicomponent systems.

Transformation of Silicate Ions into Silica under the Influence of Acid on the Structure of Serpentinite.

The process of transformation of the silicate components of the crystal lattice structure of chrysotile during its quantitative interaction with aqueous solutions containing various stoichiometrically required amounts of sulfuric acid (SRA H2SO4) calculated with respect to the magnesium content in the composition of chrysotile is investigated. It has been shown by IR spectroscopic, X-ray phase, thermal and chemical methods of investigation and analysis that, with quantitative interactions of chrysotile and sulfuric acid, first of all, the "brucite layer" of the molecular structural structure of chrysotile is exposed to acid at SRA H2SO4 = 0.1-0.3. As a result of ion exchange processes, acidic silanol (≡Si-O-H) or disilanol (=Si=(O-H)2) bonds are formed. These acid groups form one-dimensional silicate chains with transverse bridges (≡Si-O-Si≡), where the angles (Si-O-Si = 180 °C) straighten, which are recorded in the IR spectra in the region of characteristic absorption of 1220-1250 cm-1 silica. The association of the resulting acid groups into silicate chains, dimers, and trimers with transverse bridges, leads to the appearance of colloidal silica particles in the system, which cause some inhibition of the dissolution of layered magnesium hydrosilicate in sulfuric acid solutions containing H2SO4 ˃ 0.3 SRA.

Laboratory-scale characterization of slow-release permanganate gel (SRP-G) for the in-situ treatment of chlorinated-solvent groundwater plumes

Significant challenges remain for the remediation of chlorinated-solvent plumes in groundwater, such as trichloroethene (TCE) and tetrachloroethene (PCE). A novel slow-release permanganate gel (SRP-G) technique may show promise for the in-situ treatment (remediation) of chlorinated contaminant plumes in groundwater. A series of laboratory experiments were conducted to characterize the primary physical factors that influence SRP-G gelation processes to optimize SRP-G performance for plume treatment. Specifically, experiments were conducted to quantify gel zeta potential, particle size distribution, and viscosity to determine SRP-G gelation characteristics and processes. These experiments tested various concentrations of two SRP-G amendment solutions (NaMnO4 and KMnO4) prepared with 30-wt.% and 50-wt.% colloidal silica to determine such influences on zeta potential, particle size distribution, and viscosity. The results of this study show that SRP-G solutions with low zeta potential and relatively high pH favor more rapid SRP-G gelation. The concomitant interaction of the predominantly negatively charged colloidal silica particles and the positively charged dissociated cations (Na+ and K+) in the SRP-G solution had the effect of stabilizing charge imbalance via attraction of particles and thereby inducing a greater influence on the gelation process. Gel particle size distribution and changes in viscosity had a significant influence on SRP-G solution gelation. The addition of permanganate (NaMnO4 or KMnO4) increased the average particle size distribution and the viscosity of the SRP-G solution and decreased the overall gelation time. SRP-G amendments (NaMnO4 or KMnO4) prepared with 50-wt.% colloidal silica showed more effective gelation (and reduced gelation time) compared to SRP-G amendments prepared with 30-wt.% colloidal silica. Under the conditions of these experiments, it was determined that both the 7-wt.% NaMnO4 solution and 90 mg/L KMnO4 solution using 50-wt.% colloidal silica would be the optimal injection SRP-G solution concentrations for this in-situ treatment technique.

Scalable synthesis of ultrasmall hybrid silica colloidal particles through balanced solvophobic interaction and electrostatic repulsion

Scalable synthesis of ultrasmall hybrid silica colloidal particles through balanced solvophobic interaction and electrostatic repulsion

Colloidal Photonic Composites with a Long-Range Order by Hot-Pressing Polymer Brush-Grafted Silica Colloids.

Colloidal photonic composites (CPCs) are unique optical materials that combine flexible and responsive polymers with colloidal photonic crystals, and they have promising applications in colorful displays, optical anticounterfeiting, and visual sensors. However, conventional self-assembly strategies for constructing CPCs via solvent evaporation have faced limitations due to the meticulous regulation required during the evaporation process and typically long preparation durations. Here, we present an external force method to achieve a long-range ordered arrangement in CPCs by hot-pressing poly(2-[[(butylamino)carbonyl]oxy]ethyl acrylate (PBCOE)) brush-grafted silica colloidal particles (SiO2-g-PBCOE). We show that the hot-pressing conditions (i.e., temperature and pressure) and the silica volume fraction (φsilica) of the SiO2-g-PBCOE colloidal particles play crucial roles in determining their ordering and optical properties. By optimization of the hot-pressing temperature up to 100 °C and pressure of 5 MPa, a long-range ordered arrangement of SiO2-g-PBCOE colloidal particles with a φsilica of 20.3% can be achieved. For the effect of structural features, our findings reveal that SiO2-g-PBCOE colloidal particles featuring a higher φsilica are more prone to obtain a long-range ordered arrangement compared to a lower φsilica under hot-pressing conditions at relatively low temperature and pressure (50 °C and 5 MPa), which is mainly attributed to the chain entanglement and hydrogen bonding interactions induced by grafted longer polymer brushes, leading to additional energy inputs and weakening the ordering. Significantly, the critical φsilica (φc) of SiO2-g-PBCOE colloidal particles is discerned, strongly influencing the optical properties of the hot-pressed films. Specifically, a hot-pressed SiO2-g-PBCOE film with a critical φsilica of 29.3% displays enhanced optical properties characterized by intensified reflection peaks, narrowed full width at half-maximum (FWHM), and brilliant structural colors. Notably, in this work, we reveal the mechanism of hot-pressing-driven core-shell colloidal particle ordering and the key factors affecting the ordering of colloidal particles, i.e., chain entanglement and hydrogen-bonding interactions, which play a crucial role in obtaining CPCs with controllable structures. Moreover, angle-dependent structural color is observed in the hot-pressed SiO2-g-PBCOE film with a φsilica content of 29.3% due to the unique attributes of the highly ordered arrangement, while the films exhibit mechanochromic properties due to chain entanglement and hydrogen bonding interactions. This work provides valuable insights into the rapid construction of highly ordered CPCs and establishes a solid foundation for external force-assisted ordering of colloidal particles.

Influence of Surface Roughness on Interfacial Properties of Particle Networks

The behavior of colloidal particles near fluid interfaces has attracted significant scientific interest, as particles minimize the contact area between the two fluid phases, stabilizing interfacial systems. This study explores the influence of surface roughness on the properties of particle monolayers at the air–water interface, focusing on colloidal silica particles and fumed silica particles of similar hydrodynamic diameter. This research involves comparing low-surface-area (LSA) and medium-surface-area (MSA) fumed silica particles with spherical colloidal silica particles (250 nm in diameter). Utilizing a Langmuir trough, the interfacial particle networks are compressed and expanded. Analysis of surface pressure isotherms reveals that fumed silica particle monolayers form networks at a lower particle surface coverage compared to spherical particles. The spherical particle monolayer exhibits a higher apparent surface elasticity, indicating greater resistance to the applied compression compared to fumed silica networks. Additionally, monolayers formed by fumed silica particles display hysteresis even after successive compressions and expansions due to irreversible particle interlocking and the formation of multilayered aggregates. These findings provide insights into the impact of surface roughness on the behavior of particle monolayers at fluid interfaces, offering valuable information for designing and optimizing mechanisms involved in emulsion and foam stabilization.

Tracking colloidal silica particles to evaluate their dispersion and interactions in concentrated suspensions under shear force applications.

This study aimed to characterize interactions within colloidal silica particles in their concentrated suspensions, using rheo-confocal measurements and imaging, followed by image analysis. We studied the effect of shear rate (0-500s-1) and solution pH (6, 10) on the dispersion degree of colloidal silica particles via the determination and comparison of interparticle distances and their modeling. Images corresponding to different shear rates were analyzed to identify the coordinates of the particles. These coordinates were further analyzed to calculate the distance among the particles and then their surface-to-surface distance normalized by the particle diameter (H/D). It was found that the population of the particles per unit area of the image and H/D varied with increasing shear rate. The comparison between experimentally measured and theoretically calculated H/D identified that for some particles, the former was shorter than the latter, indicating the unexpected attractions among them against the Derjaguin-Landau-Verwey-Overbeek (DLVO) theory. Then, the modification of previously reported equations for H/D was suggested and confirmed its validity. Assuming pair potential interaction and hydrodynamic interaction were the main non-DLVO interactions, their magnitudes were calculated and confirmed the significance of pH and shear application strength on particle dispersion/coagulation.

Piezoelectric reverse osmosis (RO) membrane: Fabrication and anti-fouling effect

In this study, a novel piezoelectric RO membrane with vibrating mechanism when exposed to an electric field was developed. The vibration due to the piezoelectric effect can disturb the concentration polarization layer on the membrane surface and minimize membrane fouling. Polyvinylidene fluoride (PVDF) which has piezoelectric properties was selected as the porous substrate for a thin film composite (TFC) polyamide RO membrane in this study. Electrical poling was performed to enhance the piezoelectric properties of the PVDF substrate. RO membranes fabricated via interfacial polymerization using different PVDF substrates (i.e., with and without pre-wetting the PVDF substrate, with and without polyethylene terephthalate (PET) non-woven fabric support (denoted as NWF and no-NWF, respectively), with and without electrical poling) were systematically investigated. The results indicated that RO membrane fabricated on poled PVDF-NWF substrate shows reasonable pure water permeability of ∼2 LMH/bar and sodium chloride (NaCl, 2000 ppm) rejection of ∼98.9 % when tested at 15 bar. In the accelerated fouling study using colloidal silica particles (∼20 nm in diameter, 200 ppm with background of 2000 mg/L NaCl), when the RO membrane fabricated using both unpoled and poled PVDF-NWF substrates were excited with AC signal, membrane fouling was significantly reduced. These findings suggested that electrical poling may not be necessary for such piezoelectric RO membrane.

Thermoresponsive hollow polymeric shell nano/microparticles with interconnected nanoholes

AbstractPNIPAAm‐grafted thermoresponsive hollow nano‐holed polymeric‐shell (HHPS) particles were fabricated from surface‐modified colloidal silica (CS) with poly(ethylene glycol) methyl ether‐3‐(triethoxysilyl)propyl isocyanate (PEGME‐IPTES) and 3‐(trimethoxysilyl) propyl methacrylate (MPS) as templates. The polymeric shells were then synthesized through a “grafting‐through” approach via surface‐initiated polymerization of N‐isopropyl acrylamide (PNIPAAm) using potassium persulfate (KPS) as an initiator, followed by the etching of CS with hydrofluoric acid to remove the CS core templates. CS nanoparticles and PEGME‐IPTES were presynthesized using tetraethoxysilane (TEOS) and distilled water in methanol with ammonia solution as a catalyst by the sol–gel method and using 3‐(triethoxysilyl) propyl isocyanate (IPTES) with poly(ethylene glycol) methyl ether (PEGME) in the presence of dibutyltin dilaurate. The chemical structures of bare and modified CS, PNIPAAm, PNIPAAm‐CS, and HHPS particles were characterized by FT‐IR and NMR spectroscopies. SEM and TEM images confirmed that the resulting HHPS particles had a significant number of interconnected nanoholes. To evaluate the LCST behaviors of HHPS particles, the transition of transmittance and the changes in particle diameter according to the temperature change were measured through UV‐vis spectroscopy, DLS, and microscopy.

Colloidal Silica Production with Resin from Sodium Silicate and Optimization of Process

Colloidal silica is a stable and homogeneously dispersed form of amorphous silicon dioxide (SiO2) nanoparticles in water. Colloidal silica has been the focus of research due to large surface area, biocompatibility, low toxicity and chemical and thermal stability. It has been used in a wide variety of industrial applications, including pulp and paper, chromatography, electronics, foods, and colloids, as well as in the ceramics and glass industry. In this study, colloidal silica was produced using cationic resin and sodium silicate and process conditions were optimized. Temperature (50-80 °C), mixing speed (200-500 rpm) and time (20-120 min.), which significantly affect the particle size, were selected as parameters. Particle size distribution (PSD) analyzes of colloidal silica particles were performed to determine appropriate levels of the parameters. The most suitable process conditions are 50°C temperature, 40 min. and 300 rpm. The average particle size of colloidal silica produced in optimum conditions was measured as 80 nm.

High-Sensitivity Mechanochromic Sensor Using Core-Shell Colloidal Crystals

The Colloidal Crystals-based mechanochromic sensor changes color as the arrangement of colloidal particles changes in response to mechanical deformation, which can be detected through optical measurement. This type of sensor can be used in various applications, such as automobile collision detection, structural deformation detection, and medical equipment, among others. In this study, we prepared a stretchable film by dispersing surface-functionalized colloidal particles in an elastic polymer matrix. Surface of silica colloidal particle was modified with an initiator for Atom Transfer Radical Polymerization (ATRP), followed by surface-initiated ATRP of poly(t-butyl methacrylate) (PtBMA). The core-shell colloidal particles were composited with various acrylic monomers, to fabricate crystalline colloidal array which transforms to elastic film by photopolymerization exhibiting structural color. The prepared film showed a clear color change for deformation within 10%, and the peak reflectance showed more than 30%.

Sol-gel coatings for solar cover glass: Influence of surface structure on dust accumulation and removal

Soiling of solar cover glass is a major cause for efficiency loss of solar photovoltaic modules. Anti-soiling coatings can be used to reduce the rate of soiling and lower cleaning costs. The efficiency of these coatings has been demonstrated in laboratory and field tests, but the mechanisms and relevant parameters are still not well understood.In this article, we present a study on the influence of surface structure of hydrophilic sol–gel coatings on their anti-soiling performance in terms of both, dust accumulation and subsequent indoor tests for dust removal by wind. The surface structure of the films originates from the addition of colloidal silica particles of different sizes to the sols used for film preparation. In the dust deposition experiments, standardized test dust and dust collected from solar installations were used. Repeated tests were conducted under controlled humidity.In the case of dust deposition, the accumulation of dust particles larger than ∼10 µm is strongly reduced, in relation to bare glass, by the anti-soiling effect of all coatings regardless of their surface structure.For the dust removal via wind, coatings that bear a smoother surface structure are cleaned more easily than coatings with a rougher surface structure.Additionally, larger and rounder dust particles are removed more easily from coatings with a rougher surface structure (structure height over ∼40 nm), while smaller and more irregularly shaped dust particles are removed more easily from coatings with a smoother surface structure.

Preparation of gradient refractive index films on glass surface and its anti-reflection properties

This study presents the creation of a gradient refractive index film on the surface of aluminosilicate glass using a two-step process involving chemical etching and subsequent multilayer sol-gel coating with hollow silica nanospheres. The primary objective was to achieve effective anti-reflection properties. Various analytical techniques such as FESEM, TEM, UV-Vis-NIR spectrophotometry, ellipsometer, and FT-IR spectrometry were employed to investigate the impact of glass surface morphology and refractive index on optical characteristics. The results revealed the successful formation of a porous structure on the glass surface through chemical etching. Subsequently, this porous structure was uniformly filled and layered with hollow silica spheres of different sizes, resulting in a stepwise gradient refractive index coating. Notably, the pore size of the hollow spherical silica colloidal particles progressively increased from 0 nm to 23 nm, corresponding to distinct film thicknesses and refractive indices. This stepwise modulation contributed to the establishment of a gradient refractive index within the coating. By transitioning the refractive index of the film layer from that of glass to air, the film acted as a matching layer, thereby achieving broadband anti-reflection. The efficiency of this anti-reflection was demonstrated by an increase in transmittance from an initial value of 91.8–95.32% following the two-step etching process. With the subsequent SiO2 coating, the transmittance continued to improve, ultimately reaching a high value of 97.47%. This improvement in transmittance was attributed to the gradual enhancement of the film layer.

Improving the green mechanical strength and thermal shock resistance of colloidal silica‐bonded castables using La2O3

AbstractImproving the green mechanical strength of colloidal silica‐bonded corundum castables is essential to their widespread utility. The effects of varying contents (0–2 wt%) of La2O3 on the green mechanical strength of colloidal silica‐bonded corundum castables were investigated. The findings demonstrate that La2O3 has a positive impact on the green mechanical strength of colloidal silica‐bonded castables. The colloidal silica‐bonded corundum castable containing 2 wt% La2O3 exhibits higher green mechanical strength than the cement‐bonded corundum castable. Additionally, the castable shows excellent construction performance. The basic properties of La2O3 and La(OH)3 facilitate the absorption of H+ from the surface of colloidal silica to form more siloxane bonds and speed up gelation. Fourier transform infrared spectroscopy and X‐ray fluorescence spectroscopy analyses indicate that La3+ ions participate in the condensation of –Si–OH and bond the broken Si–O bonds to create Si–O–La chemical bonds. La3+ ions bridge the colloidal silica particles, leading to stable three‐dimensional network structures that result in an increased green mechanical strength of the castables. The water consumption during the hydration reaction expedites gelation, further contributing to the enhancement of the green mechanical strength of the corundum castables. Given its wide sources and stable performance, La2O3 can be considered an efficient setting agent with the potential for extensive industrial application.

Effects of various filler surfaces on tuning the hierarchical structures and reinforcement of silicone rubbers

The effects of various fillers on the hierarchical structures and reinforcement of silica filled silicone rubbers were investigated using contrast matching small-angle neutron scattering (SANS) and low-field nuclear magnetic resonance (NMR). Raw (R), modified (M), and grafted (G) surface were designed on colloidal silica particles with sizes of 20 and 80 nm. The reinforcement effects of colloidal silica on silicone rubber were compared with those of industrial (fumed and precipitated) silica. The power-law decay df,agg of fumed and precipitated filler aggregate were 2.6 and 2.4, respectively, suggesting that the fractal aggregates determined the formation of a connective filler network. The bound rubber (BR) thickness measured via CM-SANS were 8.2, 7.9, and 7.9 nm for 20 nm colloidal silica with G, M, and R surfaces, respectively. NMR results indicated that grafting could promote BR formation, resulting in the highest modulus (3.4 MPa) among those of analyzed samples. All samples had similar Dres/2π values (close to 210 Hz) but different σ/Dres values, implying that the aggregate influenced the crosslinking distribution rather than the crosslinking density. Combined with the hierarchical structures and mechanical properties, the synergistic effects of the aggregate and BR networks on the reinforcing performance of silica-filled silicone rubbers have been discussed.

Polymer Nanoparticles Applied in the CMP (Chemical Mechanical Polishing) Process of Chip Wafers for Defect Improvement and Polishing Removal Rate Response.

Chemical mechanical planarization (CMP) is a wafer-surface-polishing planarization technique based on a wet procedure that combines chemical and mechanical forces to fully flatten materials for semiconductors to be mounted on the wafer surface. The achievement of devices of a small nano-size with few defects and good wafer yields is essential in enabling IC chip manufacturers to enhance their profits and become more competitive. The CMP process is applied to produce many IC generations of nanometer node, or those of even narrower line widths, for a better performance and manufacturing feasibility. Slurry is a necessary supply for CMP. The most critical component in slurry is an abrasive particle which affects the removal rates, uniformity, defects, and removal selectivity for the materials on the wafer surface. The polishing abrasive is the source of mechanical force. Conventional CMP abrasives consist of colloidal silica, fume silica or other inorganic polishing particles in the slurries. We were the first to systematically study nanoparticles of the polymer type applied in CMP, and to compare traditional inorganic and polymer nanoparticles in terms of polishing performance. In particular, the polymer nanoparticle size, shape, solid content dosing ratio, and molecular types were examined. The polishing performance was measured for the polishing removal rates, total defect counts, and uniformity. We found that the polymer nanoparticles significantly improved the total defect counts and uniformity, although the removal rates were lower than the rates obtained using inorganic nanoparticles. However, the lower removal rates of the polymer nanoparticles are acceptable due to the thinner film materials used for smaller IC device nodes, which may be below 10 nm. We also found that the physical properties of polymer nanoparticles, in terms of their size, shape, and different types of copolymer molecules, cause differences in the polishing performance. Meanwhile, we used statistical analysis software to analyze the data on the polishing removal rates and defect counts. This method helps to determine the most suitable polymer nanoparticle for use as a slurry abrasive, and improves the reliability trends for defect counts.