For input coupling from single-mode optical fibers to photoreceivers made with silicon photonics integrated circuits (Si-PICs), we constructed a polarization-insensitive optical surface coupler with a vertically curved silicon waveguide. The polarization insensitivity was attained by the equalization of the radiative transmission losses of TE and TM polarizations in the vertically curved waveguide (VCW) structure while keeping the straight structure of the spot-size converter (SSC) connected above the curved structure. Numerical simulations revealed that the radius of curvature of 6 μm or larger nearly enabled the equalization, and thus we developed a bending technology using ion implantation to realize simultaneously a VCW radius of curvature of 6 μm and a straight SSC of length 7 μm by varying the implantation angles. The bent silicon core was subsequently coated with SiO2 by plasma-enhanced chemical vapor deposition to function as a collimation lens. The coupling properties of the fabricated coupler and the single-mode fiber with a mode-field diameter of 5 μm exhibited a polarization dependence loss of less than 0.25 dB, a 1-dB bandwidth of 180 nm, and coupling losses of about 1.6 dB at 1550 nm wavelength. A sharp inversely tapered Si waveguide that affects these characteristics significantly can be formed by applying ArF-immersion lithography on the 45-nm-node and hence fabrication is compatible with mass production processes.
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