Fine metal masks (FMMs), which are applied to manufacture next-generation organic light-emitting diode (OLED) displays with ultra-high definition (UHD) or higher, must have thicknesses of <10 μm to eliminate shadow zones. To manufacture FMMs with a thickness of 10 μm or less, a bottom-up electroplating process must be applied. The minimum coefficient of thermal expansion (CTE) of the as-deposited electroplated Invar alloy is 4 ppm; subsequent thermal treatment can lead to a CTE of zero. However, sample conditions such as surface wrinkles and edge curls may appear during this thermal treatment process. The effect of varying treatment parameters, including pressure and temperature, on the shape of the electrodeposited Invar alloy is investigated in this study by performing a thermomechanical treatment that can regulate the ultrathin FMM shape. Depending on the Ni composition, the electrodeposited Invar alloy may exist as a singular α-BCC phase or a mixed γ-FCC phase during electrodeposition. During thermomechanical treatment, a phase transformation occurs from the electrodeposited α-BCC phase to the γ”-FCC phase, and wrinkles occur owing to uneven volume change. Additionally, curls are formed owing to CTE variations according to the ratio of phases from the electrodeposition surface to the final surface varies during the plating process. Based on these results, process conditions that facilitate shape control of ultra-thin electroplated FeNi alloys were proposed.
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