In this work, the CrNbZrMoV, TiCrZrMoV, TiNbCrMoV, TiNbZrCrV and TiNbZrMoCr refractory high-entropy alloy (RHEA) coatings (1.67∼2.77 μm of thickness) were prepared by magnetron sputtering. Then, 6 MeV Au-ion irradiations with 2.5 × 1015 to 1.0 × 1016 ions/cm2 fluences were performed on these coatings at 473 K, and the surface morphology, microstructure and mechanical property were investigated. The peak damage of the CrNbZrMoV, TiCrZrMoV, TiNbCrMoV, TiNbZrCrV and TiNbZrMoCr coatings under 1.0 × 1016 ions/cm2 fluence are 48, 48, 44, 48 and 48 dpa, respectively. The peak Au concentration of the CrNbZrMoV, TiCrZrMoV, TiNbCrMoV, TiNbZrCrV and TiNbZrMoCr coatings under 1.0 × 1016 ions/cm2 fluence are 4.27 × 103, 4.12 × 103, 4.13 × 103, 4.16 × 103 and 4.37 × 103 appm, respectively. The surface morphology of the CrNbZrMoV, TiCrZrMoV, TiNbZrCrV and TiNbZrMoCr coatings were smoothed obviously. For BCC TiNbCrMoV coating, irradiation caused the growth of the nanocrystalline. For amorphous coatings, the crystallization occurred in the CrNbZrMoV, TiCrZrMoV and TiNbZrMoCr coatings after 2.5 × 1015 fluence irradiation (≥12 dpa), while the TiNbZrCrV coating remain mainly amorphous structure after all irradiation. It was found that irradiation induced continuous crystallization occurred not only at the surface but also in the peak damage zone of the coating, and then grew inside the irradiated region. Apparent irradiation hardening was observed in all the coatings except the TiNbZrCrV coating. The structural stability of these coatings under the current irradiation condition was discussed. Preliminary study shows that the great irradiation tolerance of amorphous TiNbZrCrV coating may be related to the lowest electronegativity difference (Δχ = 0.121) and large atomic size difference (δ = 9.042 %) that stabilize the structure and inhibit atomic diffusion, respectively. These findings provide the guidance for the development of high irradiation tolerance materials for future nuclear energy applications with great structural stability.
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