Among the various Metal Oxide Semiconductor (MOS) gas sensor types, solid-state gas sensors based on ZnO nanostructures have been widely used due to their properties of large exciton binding energy, wide band gape of 3.37 eV, good electrical conductivity, low cost, and high mechanical stability. In this work, ZnO nanotube nanostructures were employed for gas sensing of ethanol vapor concentrations, which is aided by their high electrochemical stability, nontoxicity, and, especially, high surface-to-volume ratio. Multiple coaxial nested ZnO nanotubes were synthesized inside porous membranes and porous templates to further enhance the sensing response to ethanol vapors with vastly increased reaction surfaces.In this study, ZnO nanotubes were synthesized by Atomic Layer Deposition (ALD) on porous Anodic Aluminum Oxide (AAO) templates with sacrificial Al2O3 layers and on porous Si membranes. The Al2O3 sacrificial layers were synthesized on porous AAO and porous Si by ALD with TMA (Al2(CH3)6) and DI water as ALD precursors. Then ZnO thin films were deposited on the surface of the sacrificial layer with precisely controlled thickness by ALD. The entire ALD procedure is considered as one ALD super cycle. More super cycles were applied to synthesize additional coaxial ZnO nanotubes. For the final removal of the sacrificial layer, Precision Ion Polishing System (PIPS) was used to first remove the top ALD surface cover. In this way, the Al2O3 sacrificial layers were exposed for Sodium Hydroxide (NaOH) etching. The objective of the Al2O3 sacrificial layers was to expose additional reactive sensing surfaces to react with the target gas by subsequent removal of these sacrificial layers. Finally, after the sacrificial layers were completely removed by wet chemical NaOH dissolution, the nested coaxial ZnO nanotube gas sensor design was fabricated with multiple sensing surfaces.To investigate the sensing performance of ZnO nanotube gas sensors to ethanol vapor, a gas sensor testing system was developed with a sealed reaction chamber and control system with stable temperature control and accurate concentration control. The sensing performance of single ZnO nanotubes, two nested coaxial ZnO nanotubes, and three nested coaxial ZnO nanotubes to ethanol vapor were measured and analyzed under various ethanol vapor concentrations and at different operating temperatures. The ZnO nanostructures sensing results on ethanol vapor demonstrated the sensing performance was considerably enhanced due to the increased surface to volume ratio in the ZnO tube structures.
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